1.产 品 资 料 介 绍：
LOGOSOL LPA812-3-V76C1 预对准器产品特点
- 整机一体化集成，无需外接控制器，布线简洁
- 低惯量无刷电机，运转平顺、响应速度快
- CCD 非接触光学扫描，不伤晶圆表面
- 兼容透明、半透明、不透光各类晶圆
- 切换晶圆规格无需调整机械结构
- 单次对准周期短，提升产线整体产能
- 定位重复精度高，角度偏移误差极小
- 真空 + 定位销双固定方式，晶圆不打滑
- 符合 1 级洁净标准，适配无尘车间环境
- 支持网口、RS232 双通讯，对接机台主控
- 整机防静电构造，防止晶圆静电损伤
- 内置硬件自检，吸附、电机故障自动报警
- 紧凑型机身，机台内部安装节省空间
- 低震动运行，不干扰周边精密部件
- 长寿命工业元器件，量产维护周期长LOGOSOL LPA812-3-V76C1 预对准器广泛配套刻蚀、镀膜、光刻设备，是晶圆传输定位核心单元。
LOGOSOL LPA812-3-V76C1预对准器 产品英文
LOGOSOL LPA812-3-V76C1 Pre Aligner Product Features
LOGOSOL LPA812-3-V76C1 is a specialized integrated pre alignment equipment for semiconductor 200/300mm wafers, which quickly completes wafer center and notch positioning.
Integrated whole machine, no need for external controller, simple wiring
Low inertia brushless motor, smooth operation and fast response speed
CCD non-contact optical scanning, without damaging the wafer surface
Compatible with various types of wafers including transparent, semi transparent, and opaque
Switching wafer specifications without adjusting mechanical structure
Short single alignment cycle, improving overall production capacity of the production line
High positioning repeatability and minimal angle offset error
Vacuum+positioning pin dual fixing method, the wafer does not slip
Compliant with Level 1 cleanliness standards and suitable for cleanroom environments
Support dual communication of network port and RS232, and interface with the main control of the machine
The whole machine is equipped with anti-static structure to prevent static damage to the wafer
Built in hardware self-test, automatic alarm for adsorption and motor faults
Compact body, space saving installation inside the machine
Low vibration operation, does not interfere with surrounding precision components
Long life industrial components with long production and maintenance cycles
The LOGOSOL LPA812-3-V76C1 pre aligner is widely compatible with etching, coating, and lithography equipment, and is the core unit for wafer transfer positioning.
LOGOSOL LPA812-3-V76C1预对准器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
