1.产 品 资 料 介 绍：
AMAT 0190-B9760 真空控制器产品特点
- 原厂适配 Endura、Centura 系列机台，直接替换安装
- 高精度压力采集，微小真空波动实时捕捉
- PID 闭环调控，快速稳定腔体目标真空值
- 多路真空规信号接入，同步监测多腔压力
- 信号隔离电路，抵御射频电磁干扰
- 过压、超真空、传感器断线多重保护
- 板载故障指示灯，快速定位真空异常
- RS485 总线通讯，对接设备主控远程监控
- 断电留存工艺真空参数，重启无需重调
- 标准机柜模块化版型，拆装维护简单
- 工业宽温运行，洁净车间长期稳定工作
- 独立信号通道，单路故障不影响整机
- 低延迟信号输出，真空阀门调节响应快
- 出厂校准标定，上机即可投入量产
- 耐腐蚀 PCB 材质，耐受工艺微量腐蚀气体AMAT 0190-B9760 真空控制器是半导体真空系统核心配件，保障等离子制程腔体压力恒定。
AMAT 0190-B9760真空控制器 产品英文
AMAT 0190-B9760 Vacuum Controller Product Features
AMAT 0190-B9760 is a dedicated vacuum control unit for semiconductor equipment, which accurately controls the vacuum degree of the cavity and is suitable for coating and etching processes.
Original factory compatible Endura and Centura series machines, directly replaced and installed
High precision pressure acquisition, real-time capture of small vacuum fluctuations
PID closed-loop control, quickly stabilize the target vacuum value of the cavity
Multi channel vacuum gauge signal access, synchronous monitoring of multi chamber pressure
Signal isolation circuit to resist radio frequency electromagnetic interference
Multiple protections for overvoltage, ultra vacuum, and sensor disconnection
Onboard fault indicator light, quickly locate vacuum abnormalities
RS485 bus communication for remote monitoring of equipment master control
Power off to retain process vacuum parameters, no need to readjust when restarting
Modular version of standard cabinet, easy disassembly and maintenance
Industrial wide temperature operation, long-term stable operation of clean workshops
Independent signal channel, single channel failure does not affect the entire machine
Low latency signal output, fast response of vacuum valve adjustment
Factory calibration and calibration, ready for mass production on the machine
Corrosion resistant PCB material, resistant to process trace corrosive gases
The AMAT 0190-B9760 vacuum controller is a core component of semiconductor vacuum systems, ensuring constant pressure in the plasma process chamber.
AMAT 0190-B9760真空控制器 产品展示
视频展示
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| 6410-023-N-N-N | 6DD1680-0AJ0 | TRICONEX 4119 |
| 6410-020-N-N-N | 6DD1680-0AH0 | TRICONEX 4000163-510 |
| 6410-012-C-H-N | 6DD1680-0AG0 | TRICONEX 4328 |
| 6410-009-N-N-N | 6DD1680-0AC2 | TRICONEX 4329 |
| 6410-008-N-N-N | 6DD1672-0AF0 | TRICONEX 4400 |
| 6410-007-N-N-N | 6DD1672-0AD0 | TRICONEX 8307A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
