1.产 品 资 料 介 绍：
NIKON X155Y10002-A 精密光学组件产品特点
- 原厂适配尼康系列曝光机，直接替换装配
- 高纯度石英镜片，紫外光透过率高
- 纳米抗反射镀膜，减少光束鬼影与损耗
- 精密一体光路结构，色差、球差矫正优异
- 微米级机械调节座，光路校准精准
- 真空环境稳定，长期使用无光学漂移
- 抗激光辐照，长时间曝光不易老化失透
- 全密封防尘结构，适配无尘洁净车间
- 低膨胀金属支架，温变下光路不变形
- 集成光束定位检测点位，方便调试
- 防静电设计，避免静电损伤晶圆光路
- 模块化分体结构，拆装维护简单
- 出厂光路标定，上机无需复杂调校
- 耐微量工艺腐蚀气体，使用寿命长
- 匹配机台闭环控制系统，联动对焦曝光NIKON X155Y10002-A 精密光学组件是光刻机核心光路部件，稳定提升晶圆曝光良率与套刻精度。
NIKON X155Y10002-A 精密光学组件 产品英文
NIKON X155Y10002-A Precision Optical Component Product Features
NIKON X155Y10002-A is an original optical path accessory for Nikon lithography machines, which controls the exposure beam and ensures nanometer level imaging accuracy.
Original factory compatible Nikon series exposure machine, directly ｒｅｐｌａｃｅ assembly
High purity quartz lenses with high UV transmittance
Nano anti reflective coating reduces beam ghosting and loss
Precision integrated optical path structure, excellent correction of color difference and spherical aberration
Micro scale mechanical adjustment seat, precise optical path calibration
Stable vacuum environment, long-term use without optical drift
Anti laser irradiation, long-term exposure is not easy to age and lose transparency
Fully sealed dust-proof structure, suitable for dust-free clean workshops
Low expansion metal bracket, the optical path does not deform under temperature changes
Integrated beam positioning and detection points for easy debugging
Anti static design to prevent static electricity from damaging the wafer optical path
Modular split structure, easy disassembly and maintenance
Factory optical path calibration, no need for complex calibration on the machine
Resistant to trace process corrosive gases and has a long service life
Matching machine closed-loop control system, linked focusing and exposure
The NIKON X155Y10002-A precision optical component is the core optical path component of lithography machines, which stably improves wafer exposure yield and etching accuracy.
NIKON X155Y10002-A 精密光学组件 产品展示
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| 6410-001-C-N-K | 6DD1661-0AD1 | 6ES5377-0AB31 |
| 6410-001-C-H-R | 6DD1661-0AD0 | 6ES5377-0AA21 |
| 6410-001-C-H-N | 6DD1661-0AB1 | NDSM03 |
| 6410-001-C-H-K | 6DD1660-0BH0 | NDSM01 |
| 6410-001 | 6DD1660-0BG0 | NDSM05 |
| 6410 | 6DD1660-0BF0 | NDSM02 |
| 61-603316-02 | 6DD1660-0BD0 | NGCM02 |
| 61-600406-000 | 6DD1660-0BC0 | NFTP01 |
| 6105-WA-PDPS | 6DD1660-0BB0 | NDSO01 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
