1.产 品 资 料 介 绍：
OLYMPUS IX71S1F-3 电动显微成像控制单元产品特点
- 原厂 UIS 无限远光学机架，刚性机身温变下光路无偏移
- 搭载电动 XY/Z 三轴载台，纳米级对焦重复定位精度
- 一体化电控集成滤镜转轮、荧光快门、物镜切换驱动
- 低震动静音伺服驱动，高速移动不损伤晶圆样品表面
- 多通道荧光光路控制，支持多波段激发自动切换
- 前置实体操作按键，搭配上位软件双模式操控
- 数字信号闭环反馈，实时回传载台坐标、光路状态
- 标准串口 / 网口通讯，对接检测机台主控联动成像
- 多重硬件防护：过行程、过载、过热自动停机锁定
- 整机防静电涂层，适配无尘晶圆检测工位使用
- 断电保存对焦坐标、光路参数，重启无需重新标定
- 分层多路隔离电路，屏蔽设备射频电磁信号干扰
- 模块化电动组件，载台、光路驱动单元可单独更换
- 高信噪比荧光光路设计，微观缺陷成像无杂斑
- 兼容培养皿、晶圆片、载玻片多种样品载具规格OLYMPUS IX71S1F-3 是半导体外观检测、材料微观分析核心成像控制整机，实现全自动高精度显微扫描检测。
OLYMPUS IX71S1F-3 机器人控制器 产品英文
Olympus IX71S1F-3 Electric Microscopy Imaging Control Unit Product Features
Olympus IX71S1F-3 is an integrated electronic control base for Olympus fully automatic inverted fluorescence microscope, which integrates stage, optical path, and shutter motion control. It is commonly used for semiconductor wafer micro inspection and material micro analysis equipment matching.
Original factory UIS infinite distance optical rack, with a rigid body and no offset in the optical path under temperature changes
Equipped with electric XY/Z three-axis stage, nanometer level focusing and repetitive positioning accuracy
Integrated electronic control, filter wheel, fluorescent shutter, objective lens switching drive
Low vibration silent servo drive, high-speed movement without damaging the surface of the wafer sample
Multi channel fluorescence light path control, supporting automatic switching of multi band excitation
Front facing physical operation buttons, paired with upper level software for dual-mode control
Digital signal closed-loop feedback, real-time feedback of carrier coordinates and optical path status
Standard serial/network communication, integrated with the main control of the testing machine for imaging linkage
Multiple hardware protections: automatic shutdown and locking for overtravel, overload, and overheating
Anti static coating for the whole machine, suitable for use in dust-free wafer testing stations
Power off to save focus coordinates and optical path parameters, restart without recalibration
Layered multi-channel isolation circuit, shielding equipment from radio frequency electromagnetic signal interference
Modular electric components, carrier and optical drive unit can be replaced separately
High signal-to-noise ratio fluorescence optical path design, no impurities in micro defect imaging
Compatible with various sample carrier specifications such as culture dishes, wafers, and glass slides
OLYMPUS IX71S1F-3 is a core imaging control machine for semiconductor appearance inspection and material microscopic analysis, achieving fully automatic high-precision microscopic scanning inspection.
OLYMPUS IX71S1F-3 机器人控制器 产品展示
视频展示
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| 5220 | 03-169460-00 | IMRI002 |
| 5215 | 193X801BAG01 | INICTO3A |
| 5210 | 8055-SCP-452 | IMDSO02 |
| 50-0176-C | 3090-VPM-277-C1 | 720-21421-001 |
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| 4VM82-000-8 | 3090-SRK-2 | IC3600SVSA1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
