1.产 品 资 料 介 绍：
AMAT 0010-C0376 真空泵产品特点
开头
- 干式无油结构，不会污染工艺腔体
- 抽速均匀，真空度维持稳定无大幅波动
- 一体式风冷散热，长时间满载温升低
- 内置压力监测模块，实时反馈真空数值
- 过温、过载、漏气多重自动保护
- 运行噪音低，适配洁净车间工况
- 标准法兰接口，对接工艺腔拆装简单
- 耐腐蚀腔体材质，耐受制程工艺气体
- 自带状态指示灯，故障快速识别
- 工业通讯端口，可接入设备主控联动
- 紧凑型机身，节省机柜安装空间
- 滤芯易拆换，日常保养操作简便
- 宽电压适配，电网波动不影响运行
- 24 小时连续量产设计，耐用故障率低
- AMAT 原厂配套，同型号备件直接替换
结尾
AMAT 0010-C0376真空泵 产品英文
AMAT 0010-C0376 Vacuum Pump Product Features
beginning
AMAT 0010-C0376 is a dry vacuum pump specifically designed for semiconductor equipment, with stable pumping and adaptability to coating and etching production lines. Its core features are as follows:
Dry oil-free structure, will not contaminate the process chamber
Uniform pumping speed, stable vacuum degree without significant fluctuations
Integrated air-cooled heat dissipation, low temperature rise under full load for a long time
Built in pressure monitoring module, providing real-time feedback on vacuum values
Multiple automatic protections for overheating, overload, and air leakage
Low operating noise, suitable for clean workshop conditions
Standard flange interface, easy disassembly and assembly of docking process chamber
Corrosion resistant chamber material, resistant to process gases
Equipped with a status indicator light for quick fault identification
Industrial communication port, capable of connecting to device master control linkage
Compact body, saving cabinet installation space
The filter element is easy to disassemble and ｒｅｐｌａｃｅ, and the daily maintenance operation is simple
Wide voltage adaptation, power grid fluctuations do not affect operation
24-hour continuous mass production design, durable and low failure rate
AMAT factory matching, direct replacement of spare parts of the same model
ending
AMAT 0010-C0376 is a clean and oil-free vacuum equipment with stable vacuum performance, which is a reliable front-end vacuum equipment for semiconductor thin film processes.
AMAT 0010-C0376真空泵 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
