1.产 品 资 料 介 绍：
DAIHEN 2L39-000158-V3 射频自动匹配器产品特点
开头
- 高速自动阻抗调节，快速匹配腔体等离子负载
- 低反射功率设计，射频能量利用率高
- 适配标准 13.56MHz 工业射频频段，工艺兼容性强
- 一体式风冷散热，长时间满载运行温升可控
- 内置过压、过流、驻波多重硬件安全保护
- 多路状态指示灯，匹配异常故障直观显示
- 工业通讯接口，可联动主机实时监控匹配参数
- 金属密封机箱，防尘耐腐蚀适配洁净车间
- 原厂标准射频接口，对接 DAIHEN 同系列射频电源
- 断电保存匹配参数，重启无需重新校准
- 标准机柜嵌入式尺寸，拆装替换操作简单
- 内部电容电感模块化，故障检修更换便捷
- 强弱电线路分区布局，抗车间电磁干扰
- 连续 24 小时量产稳定运行，匹配重复性好
- 原厂标准化备件，同 2L39 系列型号可互换
结尾
DAIHEN 2L39-000158-V3射频自动匹配器 产品英文
DAIHEN 2L39-000158-V3 RF Automatic Matcher Product Features
beginning
DAIHEN 2L39-000158-V3 is a dedicated RF matching device for semiconductor etching and coating equipment from Daihara Original Factory. It has fast impedance matching speed, low energy loss, and is compatible with TEL process machines. Its core features are as follows:
High speed automatic impedance adjustment, quickly matching cavity plasma load
Low reflection power design, high RF energy utilization efficiency
Compatible with standard 13.56MHz industrial RF frequency band, with strong process compatibility
Integrated air-cooled heat dissipation, controllable temperature rise during long-term full load operation
Built in overvoltage, overcurrent, and standing wave multiple hardware security protections
Multi channel status indicator lights, matched with visual display of abnormal faults
Industrial communication interface, which can be linked to the host for real-time monitoring and matching of parameters
Metal sealed chassis, dustproof and corrosion-resistant, suitable for clean workshops
Original factory standard RF interface, compatible with DAIHEN RF power supply of the same series
Power off to save matching parameters, restart without recalibration
Standard cabinet embedded size, easy disassembly and replacement operation
Modular internal capacitors and inductors, convenient for troubleshooting and replacement
Partition layout of strong and weak current lines, anti workshop electromagnetic interference
Continuous 24-hour mass production stable operation, good matching repeatability
Original standardized spare parts, interchangeable with 2L39 series models
ending
DAIHEN 2L39-000158-V3 is a stable RF impedance matching accessory for semiconductor plasma processes, with precise matching and complete protection.
DAIHEN 2L39-000158-V3射频自动匹配器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
