1.产 品 资 料 介 绍：
- 适配四极质谱传感器，实时传输微量气体分压数据
- 信号传输损耗低，微弱杂质气体信号无失真
- 双灯丝信号切换传输，保障设备不间断监测
- 搭载 TCP/IP 以太网通讯，直连产线工控主机
- 宽真空工况适配，最高耐受 20mTorr 工艺压力
- 内置信号滤波电路，抵御车间电磁干扰
- 自带故障指示灯，传输异常快速定位排查
- 原厂标准密封壳体，防尘耐腐蚀性工艺气体
- 微流量采样适配，可稳定传输超低浓度气体信号
- 配套 FabGuard 软件，数据实时上传记录存档
- 工业宽温设计，洁净车间长期连续运行稳定
- 模块化接线端子，拆装布线维护简单便捷
- 多重过压静电防护，保护内部信号芯片
- 小型紧凑机身，节省真空设备安装空间
- 同系列 INFICON 质谱配件通用，备件可互换
结尾
INFICON 961-H1MAP传输器 产品英文
INFICON 961-H1MAP is a signal transmission unit that is compatible with the Yingfukang Transspector XPR3+residual gas analyzer. It is suitable for gas monitoring in semiconductor high vacuum chambers and has stable signal transmission. Its core features are as follows:
Compatible with quadrupole mass spectrometry sensor, real-time transmission of trace gas partial pressure data
Low signal transmission loss, no distortion of weak impurity gas signals
Dual filament signal switching transmission ensures uninterrupted monitoring of equipment
Equipped with TCP/IP Ethernet communication, directly connected to the industrial control host of the production line
Wide vacuum working condition adaptation, with a maximum tolerance of 20mTorr process pressure
Built in signal filtering circuit to resist electromagnetic interference in the workshop
Equipped with a fault indicator light, it can quickly locate and troubleshoot transmission abnormalities
Original factory standard sealed shell, dustproof and corrosion-resistant process gas
Micro flow sampling adaptation, capable of stable transmission of ultra-low concentration gas signals
Equipped with FabGuard software, real-time data upload, recording, and archiving
Industrial wide temperature design, stable long-term continuous operation of clean workshops
Modular wiring terminals, easy and convenient disassembly, wiring, and maintenance
Multiple overvoltage and electrostatic protection to protect internal signal chips
Small and compact body, saving installation space for vacuum equipment
The same series of INFICON mass spectrometry accessories are universal and interchangeable
ending
INFICON 961-H1MAP has sensitive transmission and complete communication, and is a dedicated signal transmission component for residual gas detection in semiconductor etching and coating chambers.
INFICON 961-H1MAP传输器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
