1.产 品 资 料 介 绍：
AMAT 0090-B1772 控制模块产品特点
开头
- 独立卡盘专用运算单元，实时调控静电吸附与温度闭环
- 多路模拟量采集通道，同步监测腔体压力、温度、电压参数
- 双路工业通讯接口，对接整机主控与工厂 MES 系统
- 板载存储介质，长久留存卡盘工艺配方，断电参数不丢失
- 内置过压、过流、静电、超温四层硬件安全保护
- 面板多组 LED 指示灯，供电、通讯、故障状态直观区分
- 整机抽屉式插箱结构，机柜推拉拆装、备件替换快捷
- 强弱电内部线路分区隔离，抵御洁净车间电磁干扰
- 原厂镀金工业接口，长期反复插拔信号接触无衰减
- 一体式网孔风冷散热，24 小时量产满载温升可控
- 电路板三防涂层，耐粉尘与微量工艺腐蚀气体
- 完整故障日志记录存储，快速追溯卡盘异常停机问题
- 原生支持 SECS/GEM 协议，适配全自动智慧产线对接
- 标准化机架尺寸，同系列 0090-B 开头 ECC 模块通用互换
- 模块化分体电路，单一通道故障仅更换局部元器件
结尾
AMAT 0090-B1772控制模块 产品英文
AMAT 0090-B1772 Control Module Product Features
beginning
AMAT 0090-B1772 is a dedicated control module for ECC2 cavity of applied material semiconductor machine, which controls the temperature and pressure of wafer chuck, adsorption logic, and is compatible with Centura and Endura coating and etching equipment. The signal control is stable and reliable, and the core features are as follows:
Independent chuck dedicated computing unit, real-time control of electrostatic adsorption and temperature closed-loop
Multiple analog acquisition channels, synchronously monitoring chamber pressure, temperature, and voltage parameters
Dual industrial communication interface, connecting the main control of the whole machine with the factory MES system
Onboard storage medium, long-lasting retention of chuck process formula, no loss of power-off parameters
Built in four layers of hardware safety protection including overvoltage, overcurrent, static electricity, and overheating
Multiple sets of LED indicator lights on the panel, visually distinguishing power supply, communication, and fault status
The whole machine has a drawer style plug-in box structure, which allows for quick disassembly and replacement of cabinets and spare parts
Separate the internal circuits of strong and weak electricity to resist electromagnetic interference in clean workshops
Original factory gold-plated industrial interface, long-term repeated plugging and unplugging signal contact without attenuation
Integrated mesh hole air-cooled heat dissipation, 24-hour mass production with controllable temperature rise at full load
Three proof coating for circuit boards, resistant to dust and trace process corrosive gases
Complete fault log recording and storage, fast tracing of chuck abnormal shutdown issues
Native support for SECS/GEM protocol, compatible with fully automated smart production line docking
Standardized rack size, universal interchangeability of ECC modules starting with 0090-B in the same series
Modular split circuit, only ｒｅｐｌａｃｅ local components in case of single channel failure
ending
AMAT 0090-B1772 chuck has high control accuracy and a complete protection system. It is the core original control accessory for semiconductor thin film and etching process chamber control wafer carrier.
AMAT 0090-B1772控制模块 产品展示
视频展示
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| 6001755-02 | 6SC6190-OFB00 | NDS001 |
| 565-5-5-O-B | 6SC9830-0BA02 | NASM02 |
| 565-5-5-O-A-E | 6SC6110-0GA00 | INMMP11 |
| 565-5-5-O-A | 6SC6110-OGB00 | NASI02 |
| 565-5-5-M | 6SC6901-0EA00-Z | NCTM01 |
| 565-5-5-A | 6SC6140-1AG00 | NASM01 |
| 5645-039 | 6SC6101-5B-Z | NCOM03 |
| 5645-027 | 6SC9112-3BA05 | INNIS01 |
| 5645-024 | 6SC6100-0AA80 | IMMFP02 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
