1.产 品 资 料 介 绍：
AMAT 0010-09120 组件加热器电机
简介
- 适配半导体工艺高温加热器散热
- 匀速送风，腔体温度分布均匀
- 耐高温绝缘，长期高温工况不老化
- 低振动低噪音，不干扰晶圆工艺
- 内置过流、过热停机保护
- 状态指示灯快速识别堵转故障
- 金属密封外壳，耐工艺微量腐蚀气体
- 强弱电隔离布线，抗车间电磁干扰
- 标准法兰接口，机台拆装替换便捷
- 一体式轴承结构，使用寿命长
- 匹配 AMAT Centura、Endura 系列机台
- 断电保存运行参数，重启无需调试
- 紧凑型集成总成，占用空间小
- 自带故障记录，检修排查效率高
- 模块化结构，电机与风叶可单独更换
结尾
AMAT 0010-09120组件加热器电机 产品英文
AMAT 0010-09120 Component Heater Motor
Introduction
AMAT 0010-09120 is an application material coating/etching chamber heating matching fan motor assembly, responsible for heater heat dissipation circulation and stabilizing the chamber temperature field.
Heat dissipation of high-temperature heaters adapted to semiconductor processes
Uniform air supply, uniform temperature distribution in the chamber
High temperature resistant insulation, no aging under long-term high temperature conditions
Low vibration and low noise, do not interfere with wafer processing
Built in overcurrent and overheat shutdown protection
Quick identification of locked rotor fault with status indicator light
Metal sealed shell, resistant to process trace corrosive gases
Strong and weak electrical isolation wiring, resistant to workshop electromagnetic interference
Standard flange interface, easy disassembly and replacement of the machine
Integrated bearing structure, long service life
Match AMAT Centura and Endura series machines
Power off to save operating parameters, restart without debugging required
Compact integrated assembly, occupying small space
Equipped with fault records, high efficiency in maintenance and troubleshooting
Modular structure, motor and fan blades can be replaced separately
ending
AMAT 0010-09120 has stable heat dissipation, high temperature resistance and durability, and is the core heat dissipation power component for semiconductor process chamber heaters.
AMAT 0010-09120组件加热器电机 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
