1.产 品 资 料 介 绍：
Daihen AMN-50E6-V 射频匹配模块
- 额定 60MHz 高频、5000W 大功率输出，适配铜工艺等离子腔体
- 高速自动阻抗调谐，快速消除反射功率，射频传输效率高
- 内置精密伺服电容调谐机构，负载波动下持续稳定匹配
- 集成过驻波、过流、过温、失谐多重射频安全保护
- 全金属密闭风冷壳体，大面积散热孔，满载长时间不高温
- 标准工业通讯接口，直连机台主控实现远程参数调控
- 实时采集前向 / 反射功率数据，上传上位机监控等离子状态
- 光电隔离信号回路，抵御车间强射频电磁干扰
- 原厂标准对接端口，无损替换适配 TEL 系列半导体设备
- 加厚射频铜箔线路，低损耗传导，减少射频发热损耗
- 抗震加固内部组件，耐受机台长期持续震动工况
- 洁净防尘整机工艺，满足半导体无尘车间使用标准
- 自带故障代码指示灯，快速定位失谐、过热等异常
- 强弱电分区布局，射频信号与控制线路互不串扰
- 出厂满载射频老化、驻波联动全项校准测试结尾：Daihen AMN-50E6-V 匹配响应快、射频损耗低，稳定维持腔体等离子均匀，大幅降低工艺波动与产线停机。
Daihen AMN-50E6-V射频匹配模块 产品英文
Daihen AMN-50E6-V RF Matching Module
Introduction: Daihen AMN-50E6-V is a specialized 60MHz 5kW automatic RF matching device for TEL etching/deposition machines, which achieves precise matching of RF power supply and 50 Ω impedance of cavity plasma.
Rated 60MHz high-frequency, 5000W high-power output, suitable for copper process plasma chambers
High speed automatic impedance tuning, fast elimination of reflected power, high RF transmission efficiency
Built in precision servo capacitor tuning mechanism, continuous and stable matching under load fluctuations
Integrated multiple RF safety protections including standing wave, overcurrent, overtemperature, and detuning
All metal enclosed air-cooled shell, large area heat dissipation holes, no high temperature for a long time under full load
Standard industrial communication interface, directly connected to the main control of the machine to achieve remote parameter control
Real time collection of forward/reflected power data, uploaded to the upper computer for monitoring plasma status
Optoelectronic isolation signal circuit to resist strong radio frequency electromagnetic interference in the workshop
Original factory standard docking port, non-destructive replacement compatible with TEL series semiconductor equipment
Thickened RF copper foil circuit, low loss conduction, reduces RF heating loss
Seismic reinforcement of internal components to withstand long-term continuous vibration conditions of the machine
Clean and dust-proof whole machine process, meeting the standards for use in semiconductor dust-free workshops
Equipped with a fault code indicator light, it can quickly locate abnormalities such as misalignment and overheating
Strong and weak electrical zoning layout, with no crosstalk between RF signals and control circuits
Factory full load RF aging, standing wave linkage full calibration test
Conclusion: Daihen AMN-50E6-V has fast matching response, low RF loss, stable maintenance of uniform plasma in the cavity, and significantly reduces process fluctuations and production line downtime.
Daihen AMN-50E6-V射频匹配模块 产品展示
视频展示
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| 565-5-5-O-A | 6SC6110-OGB00 | NASI02 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
