1.产 品 资 料 介 绍：
AMAT 0015-09077 节流阀驱动器
开头：AMAT 0015-09077 是半导体设备专用节流阀驱动单元，精准控制真空管路阀门开度。
AMAT 0015-09077 适配原厂真空节流阀，配套匹配无兼容故障
阀门开度调节精度高，稳定管控腔体真空度
AMAT 0015-09077 内置位置反馈，实时回传阀位数据
支持线性、等百分比多种流量调节曲线
AMAT 0015-09077 具备过流、过载、过热多重保护
响应速度快，真空波动时快速修正阀门开度
AMAT 0015-09077 搭载标准通讯接口，对接机台主控系统
自带故障指示灯，异常状态直观显示便于检修
AMAT 0015-09077 抗粉尘耐腐蚀，适配晶圆制程严苛工况
支持分段限位设置，防止阀门超行程损坏阀体
AMAT 0015-09077 低电磁干扰，不影响精密检测信号
小型集成机身，机台内部狭小空间易安装
AMAT 0015-09077 支持 24 小时不间断连续运行
原厂标准化接线端子，拆装维护简单快捷
AMAT 0015-09077 适配刻蚀、沉积各类真空工艺腔体
结尾：AMAT 0015-09077 控压稳定、防护完善，是半导体真空系统标配节流驱动备件。
AMAT 0015-09077节流阀驱动器 产品英文
AMAT 0015-09077 Throttle Valve Driver
Introduction: AMAT 0015-09077 is a semiconductor equipment specific throttle valve drive unit that precisely controls the opening of vacuum pipeline valves.
AMAT 0015-09077 is compatible with the original vacuum throttle valve and has no compatibility issues
High precision valve opening adjustment, stable control of chamber vacuum degree
AMAT 0015-09077 has built-in position feedback and real-time feedback of valve position data
Support linear and equal percentage multiple flow adjustment curves
AMAT 0015-09077 has multiple protections for overcurrent, overload, and overheating
Fast response speed, quickly adjust valve opening during vacuum fluctuations
AMAT 0015-09077 is equipped with a standard communication interface to interface with the machine's main control system
Equipped with a fault indicator light, the abnormal status is displayed intuitively for easy maintenance
AMAT 0015-09077 is resistant to dust and corrosion, suitable for harsh working conditions in wafer manufacturing processes
Support segmented limit setting to prevent damage to valve body caused by valve overtravel
AMAT 0015-09077 low electromagnetic interference, does not affect precision detection signals
Small integrated body, easy to install in the narrow space inside the machine
AMAT 0015-09077 supports 24-hour uninterrupted continuous operation
Original factory standardized wiring terminals, easy and fast disassembly and maintenance
AMAT 0015-09077 is compatible with various vacuum process chambers for etching and deposition
Conclusion: AMAT 0015-09077 has stable voltage control and complete protection, and is a standard throttle drive spare part for semiconductor vacuum systems.
AMAT 0015-09077节流阀驱动器 产品展示
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| 073-451126-00 | 531X302DCIBAG3 | 6DD1684-0CH0 |
| 073-404555-00 | 03-10639-00 | 19-00130-00 |
| 073-404423-00 |  02-00152-00 | 03-056746-00 |
| 073-404337-00 | 193X802AAG01 | 6DD1684-0FD0 |
| 073-404227-00 | 6DD1684-0DB2 | 6DD1684-0GH0 |
| 073-404145-00 | 531X304IBDASG1 | 6SC6100-0AB80 |
| 0644536-000 | 531X304IBDARG1 | 6DD1684-0GF0 |
| 0630260-000 | 531X304IBDANG1 | 531X102CCHAJM2 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
