1.产 品 资 料 介 绍：
RFVII RF-1-MINI-CB 射频发生器
- 紧凑型机身，机台狭小空间易安装布置
- 标准工业射频频点，等离子体激发均匀稳定
- 功率无级可调，适配蚀刻、清洗多种制程
- 内置阻抗匹配电路，降低反射功率损耗
- 闭环功率反馈，输出波动小工艺一致性高
- 自带通讯接口，可对接设备主控远程调控
- 多重保护电路，过温、过流、驻波异常自动停机
- 面板状态指示灯，快速识别各类运行故障
- 风冷散热结构，支持 24 小时不间断产线运行
- 低电磁干扰设计，不影响周边精密传感元件
- 脉冲 / 连续两种输出模式自由切换使用
- 标准化接线端口，拆装检修便捷省时
- 宽电压输入，适配国内外工厂供电环境
- 整机加固结构，抗车间震动不易故障
- 适配小型真空腔体、实验室等离子设备结尾：RF-1-MINI-CB 体积小巧性能稳定，是小型真空工艺配套射频核心备件。
RFVII RF-1-MINI-CB射频发生器 产品英文
RFVII RF-1-MINI-CB RF Generator
Introduction: This small RF generator is designed to supply power for semiconductor cavity plasma processes, providing stable output of high-frequency RF energy.
Compact body, easy to install and arrange in a small space of the machine
Standard industrial RF frequency point, uniform and stable plasma excitation
Power infinitely adjustable, suitable for various etching and cleaning processes
Built in impedance matching circuit to reduce reflected power loss
Closed loop power feedback, small output fluctuations, high process consistency
Equipped with a communication interface, it can be remotely controlled by the device's main controller
Multiple protection circuits, automatic shutdown for over temperature, over current, and standing wave anomalies
Panel status indicator light, quickly identify various operational faults
Air cooled cooling structure, supporting 24-hour uninterrupted production line operation
Low electromagnetic interference design, does not affect surrounding precision sensing components
Free switching between pulse/continuous output modes
Standardized wiring ports, convenient and time-saving disassembly and maintenance
Wide voltage input, suitable for domestic and foreign factory power supply environments
Reinforced structure of the whole machine, resistant to workshop vibration and less prone to failure
Suitable for small vacuum chambers and laboratory plasma equipment
Conclusion: RF-1-MINI-CB is a compact and stable RF core spare part for small vacuum processes.
RFVII RF-1-MINI-CB射频发生器 产品展示
视频展示
中文产品
Siemens 193-1CL00-0XA0 数字输出模块
A-B 1747-ASBPLC模块
HONEYWELL 8C-PCNT01 51454363-175扩展模块
CP238TA1 Expansion CARDS
KOKUSAI CXP-544A KOMS-A2 Main control circuit board
EATON DPM-MC2 Main communication module
| AMAT 0100-71175 | TP-5114-1 | 7625013-S |
| AMAT 0100-A425 | TP-7754-2 | XLFD-160D-X1236 |
| AMAT 0100-15049 | TP-7921-1 | MCS2000-ECA |
| AMAT 0100-90659 | TP-8131-2 | PSMU-350-3 |
| AMAT 0100-00120 | TP-8140-1 | 80026-044-06-R |
| AMAT 0100-18040 | TP7907-1 | EP3-E-4-A |
| AMAT 0100-00175 | TRK-5056 | FBM230 PO926GU |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
