1.产 品 资 料 介 绍：
TEL 3D81-000040-V2 处理器模块
- TEL 3D81-000040-V2 适配 TEL 刻蚀、沉积设备核心运算控制
- 高速处理腔体温压、气体流量各类传感信号
- 内置信号滤波，抵御车间电磁信号干扰
- 多通道总线通讯，联动整机各类子板卡
- 执行完整工艺逻辑，精准管控设备运行流程
- 实时故障自检，通道异常快速上传报警
- 标准插卡式结构，拆装替换简单省时
- 多重电气防护，过压过流过热自动保护
- 无尘工业 PCB 工艺，适配洁净厂房工况
- 板载存储单元，稳定保存工艺运行参数
- 散热线路优化，支持 24 小时不间断运行
- 兼容 3D81 系列整套控制系统，拓展方便
- 对接上位 HMI 与产线 MES，数据互通顺畅
- 出厂完成整机调试，现场装机无需复杂校准
- 板卡尺寸紧凑，节省控制柜内部安装空间综上，TEL 3D81-000040-V2 处理器模块运算高效、稳定耐用，是 TEL 半导体工艺设备核心主控单元
TEL 3D81-000040-V2处理器模块 产品英文
TEL 3D81-000040-V2 processor module
TEL 3D81-000040-V2 is compatible with TEL etching and deposition equipment core operation control
High speed processing of various sensing signals such as chamber temperature and pressure, gas flow rate
Built in signal filtering to resist electromagnetic signal interference in the workshop
Multi channel bus communication, linking various sub boards of the whole machine
Execute complete process logic and accurately control equipment operation process
Real time fault self check, channel abnormality quickly uploads alarm
Standard plug-in card structure, easy to disassemble and ｒｅｐｌａｃｅ, time-saving
Multiple electrical protections, automatic protection against overvoltage, overcurrent, and overheating
Dust free industrial PCB process, suitable for clean factory working conditions
Onboard storage unit, stable storage of process operating parameters
Optimization of heat dissipation circuit, supporting 24-hour uninterrupted operation
Compatible with the entire 3D81 series control system, easy to expand
Connect the upper HMI with the production line MES, ensuring smooth data exchange
Factory completed complete machine debugging, on-site installation does not require complex calibration
Compact board size, saving installation space inside the control cabinet
Overall, the TEL 3D81-000040-V2 processor module is efficient, stable, and durable, making it the core control unit of TEL semiconductor process equipment
TEL 3D81-000040-V2处理器模块 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
