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AMAT 0190-16825可控硅功率控制器

发布时间:2026-07-01人气:
  • AMAT 0190-16825可控硅功率控制器
  • AMAT 0190-16825可控硅功率控制器
  • AMAT 0190-16825可控硅功率控制器

AMAT 0190-16825可控硅功率控制器 

1.产 品 资 料 介 绍:

AMAT 0190-16825 可控硅功率控制器产品特点

开头

AMAT 0190-16825 为应用材料半导体镀膜设备专用 SCR 可控硅功率控制器,精准管控腔室加热负载功率,控温稳定、无触点长寿命,适配晶圆产线 7×24 小时连续工艺运行。
  1. 原厂配套 Centura 系列机台,完美匹配腔体加热回路,无需改装适配
  2. 相位角 + 过零触发双模式,可按需切换适配各类电阻加热模组
  3. 0-10V 标准模拟信号控制,功率调节线性度高,温控波动极小
  4. 最大承载 30A 单相交流电流,满足腔体大功率加热负载需求
  5. 无触点可控硅开关,无电弧磨损,相比接触器使用寿命大幅提升
  6. 内置电流电压实时采样,自动补偿温漂、元件老化带来的功率偏差
  7. 多重硬件保护,过流、过压、超温、缺相即时锁止并输出告警信号
  8. 一体式金属散热风道,满载运行散热均衡,避免过热降功率
  9. 内置 EMI 滤波电路,抑制谐波干扰,不影响机台通讯与传感信号
  10. 支持恒压、恒流、恒功率三种输出模式,适配多类工艺加热配方
  11. 标准机架插装结构,端子接线规整,拆装检修停机时间短
  12. 自带状态指示灯,运行、故障、负载异常直观可视化排查
  13. 光电隔离强弱电回路,隔绝高压冲击,保护主控板卡安全
  14. 加固防尘外壳,适配半导体洁净车间,防潮防轻微腐蚀
  15. 符合 UL、RoHS 行业标准,满足半导体整机出厂合规要求

结尾

AMAT 0190-16825 可控硅功率控制器控温精准、防护完善、运行耐久,是 AMAT 薄膜沉积设备腔体加热系统核心功率调节部件。

AMAT 0190-16825可控硅功率控制器  产品英文

AMAT 0190-16825 Controllable Silicon Power Controller Product Features

beginning

AMAT 0190-16825 is a SCR thyristor power controller specifically designed for semiconductor coating equipment. It accurately controls the heating load power of the chamber, maintains stable temperature control, and has a long non-contact lifespan. It is suitable for continuous process operation of wafer production lines for 7 × 24 hours.

The original Centura series machines are perfectly matched with the cavity heating circuit, without the need for modification or adaptation

Dual mode of phase angle and zero crossing trigger, can be switched and adapted to various types of resistance heating modules as needed

0-10V standard analog signal control, high linearity of power regulation, minimal temperature control fluctuations

Maximum carrying capacity of 30A single-phase AC current, meeting the high-power heating load requirements of the cavity

Contactless thyristor switch, no arc wear, significantly improves the service life compared to contactors

Built in real-time current and voltage sampling, automatically compensating for power deviation caused by temperature drift and component aging

Multiple hardware protections, immediate locking and output of alarm signals for overcurrent, overvoltage, overtemperature, and phase loss

Integrated metal heat dissipation duct, balanced heat dissipation during full load operation, avoiding overheating and power reduction

Built in EMI filtering circuit, suppresses harmonic interference, does not affect machine communication and sensing signals

Supports three output modes: constant voltage, constant current, and constant power, suitable for various types of process heating formulas

Standard rack plug-in structure, regular terminal wiring, short disassembly and maintenance downtime

Equipped with a built-in status indicator light, it provides intuitive and visual troubleshooting for running, faults, and abnormal loads

Optoelectronic isolation of strong and weak electrical circuits, isolation of high-voltage shocks, and protection of the safety of the main control board

Reinforced dust-proof casing, suitable for semiconductor cleanrooms, moisture-proof and slightly corrosion-resistant

Compliant with UL and RoHS industry standards, meeting the factory compliance requirements for semiconductor complete machines

ending

The AMAT 0190-16825 thyristor power controller has precise temperature control, complete protection, and durable operation. It is the core power regulation component of the AMAT thin film deposition equipment chamber heating system.

AMAT 0190-16825可控硅功率控制器  产品展示

0190-16825 (2).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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