1.产 品 资 料 介 绍：
TEL 3D80-000142-V8 射频自动匹配机产品特点
- 阻抗检测速度快，实时监测负载变化
- 自动完成匹配调节，无需人工操作
- 减少射频反射，功率利用率更高
- 内置过载防护，保护整机射频部件
- 适配 13.56MHz 主流射频工作频率
- 长时间运行散热稳定，温升低
- 标准通讯端口，可联动设备主控
- 负载适配区间大，适配多种工艺气体
- 等离子输出均匀，提升晶圆加工品质
- 整机结构紧凑，拆装检修简单
- 实时采集功率、驻波等运行数据
- 抗电磁干扰，车间工况运行稳定
- 兼容脉冲射频工艺，匹配无延迟
- 原厂精密配件，运行故障少
- 连续作业耐久度高，使用寿命久结尾：TEL 3D80-000142-V8 射频自动匹配机匹配效率高、运维简便，是半导体刻蚀镀膜设备核心配套配件。
TEL 3D80-000142-V8 射频自动匹配机 产品英文
TEL 3D80-000142-V8 RF Automatic Matching Machine Product Features
Introduction: TEL 3D80-000142-V8 RF automatic matching machine is suitable for semiconductor plasma equipment, automatically adjusts RF impedance, and stabilizes process output.
Fast impedance detection speed, real-time monitoring of load changes
Automatically complete matching adjustment without manual operation
Reduce RF reflection and achieve higher power utilization efficiency
Built in overload protection to protect the RF components of the entire machine
Adapt to mainstream RF operating frequency of 13.56MHz
Long term operation with stable heat dissipation and low temperature rise
Standard communication port, capable of linking with device master control
Large load adaptation range, suitable for multiple process gases
Uniform plasma output improves wafer processing quality
Compact overall structure, easy disassembly and maintenance
Real time collection of power, standing wave and other operational data
Anti electromagnetic interference, stable operation in workshop conditions
Compatible with pulse RF technology, matched without delay
Original precision accessories with minimal operational failures
High durability and long service life for continuous operation
Conclusion: TEL 3D80-000142-V8 RF automatic matching machine has high matching efficiency and easy operation and maintenance, and is a core supporting component of semiconductor etching and coating equipment.
TEL 3D80-000142-V8 射频自动匹配机 产品展示
视频展示
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| AMAT 0190-09263 | AMAT 0190-08858 | AMAT 0190-08850 |
| AMAT 0190-09263 | AMAT 0190-08875 | AMAT 0190-08851 |
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| AMAT 0190-09267 | AMAT 0190-08922 | AMAT 0190-08855 |
| AMAT 0190-09134 | AMAT 0190-08931 | AMAT 0190-08856 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
