1.产 品 资 料 介 绍：
EDWARDS SCU-A2503PV 控制单元
- 专为 STP-A2503PV 防腐型分子泵匹配，整机联动稳定
- 全数字闭环调速，转速波动小，抽真空效率恒定
- 内置 TMS 温控管理，自动调控泵体加热与冷却阀
- 实时监测转子振动，自动减振，降低腔体震动干扰
- 轴承状态持续检测，提前预警轴承损耗故障
- 多重硬件防护，过温、过流、过载自动停机保护
- 标准通讯接口，可对接设备整机主控远程管控
- 本地存储运行日志，方便追溯泵体工况数据
- 面板状态指示灯，直观显示运行、报警、待机状态
- 金属屏蔽壳体，抵御半导体腔体射频电磁干扰
- 洁净工业元器件，适配无尘腐蚀气体工艺环境
- 紧凑型机柜安装结构，拆装替换操作简便
- 宽温稳定运行，支持 24 小时不间断量产作业
- 自带故障代码提示，快速定位真空系统异常
- 耐腐蚀线路设计，适配含腐蚀性工艺气体工况结尾：EDWARDS SCU-A2503PV 是防腐分子泵核心控制部件，广泛用于半导体刻蚀、薄膜沉积真空设备。
EDWARDS SCU-A2503PV控制单元 产品英文
EDWARDS SCU-A2503PV Control Unit
Introduction: EDWARDS SCU-A2503PV is a dedicated digital control unit for STP-A2503 corrosion-resistant magnetic levitation molecular pump, which controls the start stop, speed and temperature control of the pump body, and is suitable for semiconductor corrosion process vacuum chambers.
Specially matched for STP-A2503PV anti-corrosion molecular pump, with stable linkage of the whole machine
Fully digital closed-loop speed regulation, with minimal speed fluctuations and constant vacuum pumping efficiency
Built in TMS temperature control management, automatically regulating the heating and cooling valves of the pump body
Real time monitoring of rotor vibration, automatic vibration reduction, and reduction of cavity vibration interference
Continuous monitoring of bearing status, early warning of bearing loss faults
Multiple hardware protections, automatic shutdown protection against overheating, overcurrent, and overload
Standard communication interface, capable of connecting to the main control and remote management of the entire device
Local storage of operation logs for easy traceability of pump body operating condition data
Panel status indicator light, visually displaying running, alarm, and standby states
Metal shielding shell, resistant to semiconductor cavity RF electromagnetic interference
Clean industrial components, suitable for dust-free corrosive gas process environments
Compact cabinet installation structure, easy disassembly and replacement operation
Wide temperature stable operation, supporting 24-hour uninterrupted mass production operations
Equipped with fault code prompts, quickly locate vacuum system abnormalities
Corrosion resistant circuit design, suitable for working conditions with corrosive process gases
Conclusion: EDWARDS SCU-A2503PV is a core control component of anti-corrosion molecular pumps, widely used in semiconductor etching and thin film deposition vacuum equipment.
EDWARDS SCU-A2503PV控制单元 产品展示
视频展示
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| PXI-2501 | HONEYWELL 05701-A-0325 | TU830V1 3BSE013234R1 |
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| PPU-3 | 6SC9811-4DA04 | 6DD2920-0AR0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
