1.产 品 资 料 介 绍：
TEL CX81-050024-V2 PCB 控制板
- 多通道信号采集，对接温度、真空、限位各类传感器
- 板载光电隔离电路，隔绝射频电磁信号干扰
- 多层屏蔽 PCB 布线，降低腔体杂波干扰
- 内置硬件联锁保护，异常自动切断工艺输出
- 原厂标准插卡式结构，机柜拆装替换简单
- 专属设备通讯协议，对接整机主控无需调试
- 本地存储工艺配方，断电参数不丢失
- 多路数字 IO 通道，管控气阀、加热、射频单元
- 自带状态指示灯，快速定位线路故障点位
- 洁净级工业元器件，适配无尘晶圆车间
- 0-50℃宽温，支持设备 24 小时连续量产
- 过压、过流、短路三重硬件防护设计
- 低延迟数据传输，多腔体动作同步无偏差
- 标准化端子排布，接线牢固不易松动
- 适配 TEL 系列刻蚀、薄膜沉积整机设备结尾：TEL CX81-050024-V2 是半导体腔体核心控制板，稳定管控整套晶圆工艺流程。
TEL CX81-050024-V2 PCB控制板 产品英文
TEL CX81-050024-V2 PCB Control Board
Introduction: TEL CX81-050024-V2 is a dedicated main control PCB board for Tokyo Electronic Semiconductor process equipment, which coordinates cavity signal acquisition and process logic control, and is compatible with wafer etching and deposition equipment.
Multi channel signal acquisition, docking with temperature, vacuum, and limit sensors of various types
Onboard optoelectronic isolation circuit to isolate RF electromagnetic signal interference
Multi layer shielded PCB wiring reduces cavity clutter interference
Built in hardware interlock protection, automatically cutting off process output in case of abnormal conditions
Original factory standard plug-in card structure, easy disassembly and replacement of cabinets
Exclusive device communication protocol, no debugging required for docking with the main control of the entire machine
Local storage of process formulas, without loss of power-off parameters
Multiple digital IO channels, controlling air valves, heating, and RF units
Equipped with a status indicator light, quickly locate the fault point of the circuit
Clean grade industrial components, suitable for dust-free wafer workshops
0-50 ℃ wide temperature range, supporting 24-hour continuous mass production of equipment
Triple hardware protection design for overvoltage, overcurrent, and short circuit
Low latency data transmission, multi cavity action synchronization without deviation
Standardized terminal layout, firm and not easily loose wiring
Compatible with TEL series etching and thin film deposition equipment
Conclusion: TEL CX81-050024-V2 is a semiconductor cavity core control board that stably controls the entire wafer process flow.
TEL CX81-050024-V2 PCB控制板 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
