1.产 品 资 料 介 绍：
AMAT 0015-B2470 控制器模块
- 多路信号同步采集，对接温度、真空、限位传感器
- 内置逻辑运算单元，精准执行整套工艺时序控制
- 光电隔离电路，隔绝射频干扰保护主板电路
- 多层屏蔽 PCB，适配腔体强电磁车间环境
- 硬件安全互锁，异常工况自动切断工艺输出
- 标准机架插卡结构，拆装替换无需复杂布线
- 原厂专属通讯协议，对接整机主控即插即用
- 本地缓存工艺参数，断电配方数据不丢失
- 实时故障自检，指示灯快速反馈异常点位
- 多路数字 IO 通道，管控气阀、加热、射频单元
- 洁净级工业元器件，适配无尘晶圆车间
- 0-50℃宽温运行，支持 24 小时不间断量产
- 过压、过流、短路三重硬件防护
- 低延迟数据传输，多腔体动作同步无偏差
- 适配 AMAT Endura、Centura 系列工艺设备结尾：AMAT 0015-B2470 是设备腔体核心控制板卡，稳定把控薄膜、刻蚀全流程工艺逻辑。
AMAT 0015-B2470控制器模块 产品英文
AMAT 0015-B2470 Controller Module
Introduction: AMAT 0015-B2470 is a dedicated plug-in control module for semiconductor deposition and etching equipment, which coordinates cavity signals and process actions to ensure stable operation of wafer production.
Multi channel signal synchronous acquisition, connected to temperature, vacuum, and limit sensors
Built in logic operation unit, precise execution of the entire process timing control
Optoelectronic isolation circuit, isolating RF interference to protect the motherboard circuit
Multi layer shielded PCB, suitable for strong electromagnetic workshop environment in the cavity
Hardware safety interlock, automatic cut-off of process output in abnormal working conditions
Standard rack card insertion structure, disassembly and replacement do not require complex wiring
Original factory exclusive communication protocol, plug and play connection with the main control of the whole machine
Local caching of process parameters, no loss of power-off formula data
Real time fault self check, indicator light quickly feedbacks abnormal points
Multiple digital IO channels, controlling air valves, heating, and RF units
Clean grade industrial components, suitable for dust-free wafer workshops
0-50 ℃ wide temperature operation, supporting 24-hour uninterrupted mass production
Triple hardware protection against overvoltage, overcurrent, and short circuit
Low latency data transmission, multi cavity action synchronization without deviation
Compatible with AMAT Endura and Centura series process equipment
Conclusion: AMAT 0015-B2470 is the core control board of the equipment cavity, which stably controls the entire process logic of film and etching.
AMAT 0015-B2470控制器模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
