1.产 品 资 料 介 绍：
Daihen RMN-20E2-V 射频匹配器产品特点
- 原厂日本大恒制造，适配 TEL 半导体工艺设备
- 13.56MHz 标准射频频段，额定输出功率 2000W
- 快速自动阻抗调谐，降低射频功率反射损耗
- 金属全封闭屏蔽壳体，隔绝车间电磁干扰
- 宽幅交流输入 100-200VAC，适配厂区电网
- 内置过流、过压、过热多重电路防护
- 配备安全联锁盖板，高压作业更安全
- 搭载 RS232 通讯接口，可对接整机主控
- 低射频损耗内部元件，功率传输效率高
- 实时采集驻波信号，异常状态快速反馈
- 标准机柜立式安装，拆装替换操作简单
- 内置散热风道，24 小时连续运行不易高温
- 洁净车间防尘密封结构，适配无尘工况
- 原厂精密射频电容电感，匹配精度稳定
- 减少等离子波动，保障薄膜工艺均匀度结尾：Daihen RMN-20E2-V 调谐迅速、防护完善，是半导体射频工艺设备核心匹配配件。
Daihen RMN-20E2-V射频匹配器 产品英文
Daihen RMN-20E2-V RF Matcher Product Features
Introduction: Daihen RMN-20E2-V is a specialized automatic RF matching device for semiconductor etching and coating equipment, suitable for 13.56MHz, 2000W RF systems, and stably matches the load impedance of the cavity.
Made by Daihatsu in Japan, compatible with TEL semiconductor process equipment
13.56MHz standard RF frequency band, rated output power 2000W
Fast automatic impedance tuning to reduce RF power reflection loss
Metal fully enclosed shielding shell, isolating electromagnetic interference in the workshop
Wide range AC input 100-200VAC, compatible with the factory power grid
Built in multiple circuit protections for overcurrent, overvoltage, and overheating
Equipped with safety interlock cover plate, high-pressure operation is safer
Equipped with RS232 communication interface, it can be connected to the main control of the whole machine
Low RF loss internal components, high power transmission efficiency
Real time collection of standing wave signals, rapid feedback of abnormal states
Standard cabinet vertical installation, easy disassembly and replacement operation
Built in heat dissipation duct, capable of continuous operation for 24 hours without high temperatures
Clean workshop dust-proof sealing structure, suitable for dust-free working conditions
Original precision RF capacitors and inductors with stable matching accuracy
Reduce plasma fluctuations and ensure uniformity of thin film processes
Conclusion: Daihen RMN-20E2-V has fast tuning and complete protection, making it a core matching accessory for semiconductor RF process equipment.
Daihen RMN-20E2-V射频匹配器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
