1.产 品 资 料 介 绍：
INFICON SPC-953-G1 气体分析仪产品特点
- 原厂英福康四极杆质谱检测，精准识别各类工艺残余气体
- 宽质量数检测范围，可捕捉微量杂质与反应副产物
- 高速扫描采集，实时反馈腔体气体浓度变化
- 一体式紧凑机身，适配半导体刻蚀、镀膜真空腔体安装
- 金属密闭散热壳体，屏蔽车间电磁射频干扰
- 高压内部电路带安全锁止，高压作业防护可靠
- 支持 RS485 / 以太网通讯，对接设备主控系统上传数据
- 内置标准气体数据库，自动匹配识别气体种类
- 实时浓度阈值报警，腔体异常污染快速预警
- 水冷散热结构，适配高温真空工艺持续工况
- 前置传感器接口，拆装更换探头操作简便
- 低离子源损耗设计，长期使用维护周期长
- 多重电路保护，防静电、过压、短路损坏设备
- 洁净车间专用密封结构，防尘防潮适配无尘环境
- 完整运行日志存储，便于工艺追溯与故障排查结尾：INFICON SPC-953-G1 检测灵敏、数据稳定，是半导体真空工艺腔体气体监测核心分析设备。
INFICON SPC-953-G1气体分析仪 产品英文
INFICON SPC-953-G1 Gas Analyzer Product Features
Introduction: INFICON SPC-953-G1 is a Transpector 2 series semiconductor specific residual gas analyzer (RGA) used for real-time monitoring of trace gas components in vacuum chambers.
Original factory Yingfukang quadrupole mass spectrometry detection, accurately identifying various residual gases in processes
Wide mass detection range, capable of capturing trace impurities and reaction by-products
High speed scanning acquisition, real-time feedback on changes in chamber gas concentration
Integrated compact body, suitable for semiconductor etching and coating vacuum chamber installation
Metal enclosed heat dissipation shell, shielding workshop electromagnetic radio frequency interference
High voltage internal circuit with safety lock, reliable protection for high-voltage operations
Support RS485/Ethernet communication, connect to the main control system of the device to upload data
Built in standard gas database, automatically matching and identifying gas types
Real time concentration threshold alarm, rapid warning of abnormal chamber contamination
Water cooled cooling structure, suitable for continuous working conditions of high temperature vacuum process
Front sensor interface, easy to disassemble and ｒｅｐｌａｃｅ probe operation
Low ion source loss design, long maintenance cycle for long-term use
Multiple circuit protection, anti-static, overvoltage, short circuit damage to equipment
Specialized sealing structure for clean workshops, dustproof and moisture-proof, suitable for dust-free environments
Complete operation log storage for easy process traceability and troubleshooting
Conclusion: INFICON SPC-953-G1 has sensitive detection and stable data, making it the core analytical equipment for gas monitoring in semiconductor vacuum process chambers.
INFICON SPC-953-G1气体分析仪 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
