1.产 品 资 料 介 绍：
Daihen 3D39-000004-V2 射频自动匹配器产品特点
- 标准 13.56MHz 工作频率，适配主流等离子工艺射频电源
- 高速自动调谐回路，负载突变时快速完成阻抗匹配
- 大幅降低射频反射功率，提升腔体等离子能量利用率
- 内置精密可变电容组件，匹配精度高，工艺重复性好
- 搭载实时功率检测模块，实时采集入射与反射功率数据
- 多重硬件保护机制，过功率、过温、失配自动停机防护
- 标准化通讯接口，可与 TEL 半导体设备主控联动通讯
- 紧凑型机身结构，节省机台内部安装空间，布线便捷
- 工业级散热风道，长时间连续运行稳定控温不积热
- 适配中功率射频输出，兼容薄膜、刻蚀各类晶圆制程
- 内置故障自检程序，开机自动校验匹配回路状态
- 抗电磁干扰屏蔽壳体，减少射频信号外泄干扰设备
- 模块化内部结构，故障部件可单独拆解维修更换
- 宽电压适配设计，满足晶圆厂洁净车间供电环境
- 长寿命耐损耗元器件，适配产线 7×24 小时不间断作业Daihen 3D39-000004-V2 是半导体等离子设备核心阻抗匹配配件，保障工艺均匀稳定。
Daihen 3D39-000004-V2 射频自动匹配器 产品英文
Daihen 3D39-000004-V2 RF Automatic Matcher Product Features
Daihen 3D39-000004-V2 is compatible with semiconductor etching and thin film deposition plasma RF systems, with stable impedance matching performance.
Standard operating frequency of 13.56MHz, compatible with mainstream plasma process RF power supply
High speed automatic tuning circuit, quickly completes impedance matching during sudden load changes
Significantly reduce RF reflection power and improve the utilization efficiency of cavity plasma energy
Built in precision variable capacitor components, high matching accuracy, and good process repeatability
Equipped with real-time power detection module, real-time collection of incident and reflected power data
Multiple hardware protection mechanisms, automatic shutdown protection against over power, over temperature, and mismatch
Standardized communication interface, capable of linked communication with TEL semiconductor equipment master control
Compact body structure saves installation space inside the machine and facilitates wiring
Industrial grade heat dissipation duct, stable temperature control for long-term continuous operation without heat accumulation
Suitable for medium power RF output, compatible with various wafer processes such as thin film and etching
Built in fault self checking program, automatically verifies the matching circuit status upon startup
Anti electromagnetic interference shielding shell, reducing the leakage of RF signals and interfering with equipment
Modular internal structure, faulty components can be disassembled, repaired, and replaced separately
Wide voltage adaptation design to meet the power supply environment of clean workshops in wafer fabs
Long life and wear and tear resistant components, suitable for 7 × 24-hour uninterrupted operation on production lines
Daihen 3D39-000004-V2 is a core impedance matching accessory for semiconductor plasma equipment, ensuring uniform and stable processes.
Daihen 3D39-000004-V2 射频自动匹配器 产品展示
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| PMB31B-00101-00 | AMAT 0100-91085 | PFTL101AER 2.0KN 3BSE023012R1 |
| PMB31B-00100-00 | INBIM02 | 57160001-PA DSDI 116 |
| PMB23C-00114-00 | INNPM01 | 57120001-RB DSTA 002 |
| PMB22D-10116-00 | 07EA62R1 | 3BSE005880R1 TK560 |
| PMB22B-10100-00 | 70 EA 01b-E | PFTL101AER 1.0KN 3BSE023011R1 |
| PMB21D-30114-00 | AMAT 0100-00049 | 57160001-YX DSTD W130 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
