1.产 品 资 料 介 绍：
Verity 3D80-000906-V6 传感器产品特点
- 高精度光谱采集，精准捕捉等离子光信号判断工艺终点
- 低噪声感光芯片，微弱光信号也可稳定识别无偏差
- 多波段光谱检测，适配薄膜、刻蚀多种晶圆工艺
- 高速信号采样，实时反馈腔体等离子状态变化
- 光纤式光路设计，隔离射频干扰不影响检测精度
- 配套标准通讯协议，可直连设备主控实时传输数据
- 内置算法阈值可调，灵活适配不同厚度晶圆制程
- 整机恒温控温模块，杜绝温度漂移造成检测误差
- 小型一体化结构，适配机台狭小洁净安装空间
- 多重故障自检，光路、信号异常自动上报告警
- 防尘密封壳体，适配半导体洁净车间长期使用
- 信号光电隔离，规避高低压回路互相干扰
- 长寿命光学元器件，满足产线 7×24 连续运行
- 支持数据本地缓存，方便工艺数据追溯复盘
- 标准化插拔接口，拆装维护无需整机停机Verity 3D80-000906-V6 是半导体设备核心光学检测配件，保障制程一致性。
Verity 3D80-000906-V6 传感器 产品英文
Verity 3D80-00906-V6 Sensor Product Features
Verity 3D80-000906-V6 is used for endpoint detection in semiconductor plasma etching processes, with stable and reliable optical detection.
High precision spectral acquisition, precise capture of plasma light signals to determine process endpoint
Low noise photosensitive chip, capable of stable recognition of weak light signals without deviation
Multi band spectral detection, suitable for various wafer processes such as thin film and etching
High speed signal sampling, real-time feedback of plasma state changes in the cavity
Fiber optic optical path design, isolating RF interference without affecting detection accuracy
Equipped with standard communication protocols, it can directly connect to the device master for real-time data transmission
Built in algorithm threshold adjustable, flexible adaptation to different thickness wafer processes
The whole machine is equipped with a constant temperature control module to prevent detection errors caused by temperature drift
Small integrated structure, suitable for narrow and clean installation space of machines
Multiple fault self check, automatic reporting of abnormal light path and signal to the alarm
Dustproof sealed shell, suitable for long-term use in semiconductor clean rooms
Signal photoelectric isolation to avoid mutual interference between high and low voltage circuits
Long life optical components that meet the continuous operation of 7 × 24 production lines
Support local caching of data for easy traceability and review of process data
Standardized plug-in interface, disassembly and maintenance without the need for complete machine shutdown
Verity 3D80-00906-V6 is a core optical inspection component for semiconductor equipment, ensuring process consistency.
Verity 3D80-000906-V6 传感器 产品展示
视频展示
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AMCI 7264 interface module
| PMA54Q-10100-00 | 70 AS 40b-E | 3BUR980025R1 DSTX 180 |
| PMA54Q-00100-00 | AMAT 0100-71261 | N32HREM-LNK-NS-00 |
| PMA53R-00100-00 | NKTU117 | P21NRLC-LSS-NS-03 |
| PMA53Q-10100-00 | AMAT 0110-00001 | N31HRLJ-LNK-NS-01 |
| PMA53Q-00100-00 | IMASO01 | 57160001-PE DSDI 126 |
| PMA45R-11100-02 | 70 AS 32a-E | 57160001-BH DSTD 110 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
