1.产 品 资 料 介 绍：
TEL 5868-000002-V1 晶闸管控制单元产品特点
- 高精度移相触发控制，微调晶闸管导通角，平稳调节输出功率
- 无触点晶闸管开关结构，无机械磨损，启停响应速度快
- 内置电流电压实时采集，闭环动态修正输出，控温一致性强
- 光电隔离控制回路，隔绝射频干扰，适配刻蚀沉积复杂电磁环境
- 多重硬件防护，过流、缺相、超温、短路自动切断输出
- 原厂专属通讯总线，可与整机主控同步功率与故障数据
- 上电自动自检校准触发回路，避免功率输出偏移
- 紧凑型一体化模组，节省设备控制柜内部安装空间
- 高效散热结构，长时间大功率运行不易过热降功率
- 缓启动缓关断功能，降低电网冲击，保护加热元器件
- 多层隔离 PCB 布线，强弱电分区，减少信号串扰失真
- 非易失存储留存功率参数，断电重启无需重新调试
- 标准化插拔接线端子，单独拆装检修无需整机停机
- 工业级加固功率器件，耐受产线长期震动稳定运行
- 原生匹配 TEL 晶圆工艺设备，可直接替换同规格旧单元TEL 5868-000002-V1 是半导体加热系统核心功率调控部件，保障工艺温度稳定可控。
TEL 5868-000002-V1 晶闸管控制单元 产品英文
TEL 5868-000002-V1 thyristor control unit product features
TEL 5868-000002-V1 is compatible with Tokyo Electronic Semiconductor Equipment and is responsible for precise adjustment of heating load power.
High precision phase-shift trigger control, fine tune thyristor conduction angle, and smoothly adjust output power
Contactless thyristor switch structure, no mechanical wear, fast start stop response speed
Built in real-time current and voltage acquisition, closed-loop dynamic correction output, strong temperature control consistency
Optoelectronic isolation control circuit, isolated from radio frequency interference, suitable for complex electromagnetic environments such as etching and deposition
Multiple hardware protection, automatic output cut-off for overcurrent, phase loss, overheating, and short circuit
Original factory exclusive communication bus, which can synchronize power and fault data with the main control of the whole machine
Power on automatic self check calibration trigger circuit to avoid power output offset
Compact integrated module, saving installation space inside the equipment control cabinet
Efficient heat dissipation structure, less prone to overheating and power reduction during long-term high-power operation
Slow start and slow shutdown function, reducing power grid impact and protecting heating components
Multi layer isolated PCB wiring, strong and weak electrical zoning, reducing signal crosstalk distortion
Non volatile storage retains power parameters, no need to re debug after power failure and restart
Standardized plug and unplug wiring terminals, separate disassembly and maintenance without the need for complete machine shutdown
Industrial grade reinforced power devices, capable of withstanding long-term vibration and stable operation of the production line
Native matching TEL wafer process equipment, can directly ｒｅｐｌａｃｅ old units of the same specifications
TEL 5868-000002-V1 is the core power control component of semiconductor heating systems, ensuring stable and controllable process temperature.
TEL 5868-000002-V1 晶闸管控制单元 产品展示
视频展示
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| PC843-001-A |  6SC6100-0NA01 | HESG447043R0001 70VV01A |
| PC842-XYZ-T | 6SC6100-0GB12 | HESG446624R0001 XT377E |
| PC842-XYZ-N | 6SC6500-0NA04 | NTHS03 |
| PC842-XYZ-F | Gespac GESSBS-4 GESSBS-6A GESSIO-1E | NTRO02 |
| PC842-XYZ-A | Gespac INC-1 | NKHS03-15 |
| PC842-001-T | Gespac CI0-1B | PHARPSCH100000 |
| PC842-001-N | Gespac SI0-1E | HESG332181R0001 70BL02D-S |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
