1.产 品 资 料 介 绍：
Edwards 2L11-000007-V1 涡轮控制器产品特点
- 自动识别配套 nEXT/EXT 系列涡轮泵，即插即用无需额外参数匹配
- 分段可控升速曲线，缓启动降低转子冲击，延长泵体轴承寿命
- 实时采集转子转速、腔体真空度，可视化显示满载运行状态
- 集成泄压阀、冷却风扇驱动回路，同步管控真空辅件联动动作
- 多重安全联锁保护，超温、超速、前级压力异常自动停机锁止
- 光电隔离逻辑 IO 端口，隔绝射频干扰，适配刻蚀沉积复杂电磁环境
- RS485 标准通讯总线，可与设备主控同步上传运行数据与故障代码
- 内置压力联动逻辑，真空达标自动触发涡轮启停、泄压时序
- 非易失存储留存工艺参数，断电重启无需重新配置控制曲线
- 紧凑型机架式结构，适配控制柜狭小槽位，支持面板嵌入式安装
- 整机出厂老化测试，转速、压力、通讯全通道校验无隐患
- 独立供电回路，控制器故障不会击穿涡轮泵驱动绕组
- 多模式泄压可选，低速缓泄、快速泄压自由切换适配不同制程
- 金属屏蔽外壳，抑制内部变频谐波，不干扰真空压力传感器
- 标准化插拔接线端子，单独拆装检修无需整机停机破真空Edwards 2L11-000007-V1 是半导体高真空系统核心控制单元，保障涡轮泵稳定持续抽真空作业。
Edwards 2L11-000007-V1 涡轮控制器 产品英文
Edwards 2L11-00007-V1 Turbine Controller Product Features
Edwards 2L11-00007-V1 is compatible with semiconductor vacuum chamber turbo molecular pump, and controls the complete logic of molecular pump start stop, speed, and vacuum pressure relief.
Automatic recognition of matching nEXT/NEXT series turbo pumps, plug and play, no need for additional parameter matching
Segmented controllable acceleration curve, slow start to reduce rotor impact, extend pump bearing life
Real time collection of rotor speed and chamber vacuum, visualized display of full load operation status
Integrated pressure relief valve, cooling fan drive circuit, synchronized control of vacuum accessory linkage action
Multiple safety interlock protection, automatic shutdown and locking for overheating, overspeed, and abnormal front-end pressure
Optoelectronic isolation logic IO port, isolated from RF interference, suitable for complex electromagnetic environments such as etching and deposition
RS485 standard communication bus, capable of synchronously uploading operational data and fault codes with the device master control
Built in pressure linkage logic, automatic triggering of turbine start stop and pressure relief timing when vacuum meets standards
Non volatile storage retains process parameters, without the need to reconfigure control curves during power outages and restarts
Compact rack mounted structure, suitable for narrow slots in control cabinets, supports panel embedded installation
The whole machine undergoes factory aging testing, and the speed, pressure, and communication channels are verified to have no hidden dangers
Independent power supply circuit, controller failure will not penetrate the drive winding of the turbo pump
Multi mode pressure relief is optional, with free switching between low-speed slow relief and fast relief to adapt to different processes
Metal shielding shell, suppresses internal frequency conversion harmonics, does not interfere with vacuum pressure sensors
Standardized plug and unplug wiring terminals, separate disassembly and maintenance without the need for complete machine shutdown and vacuum breaking
Edwards 2L11-00007-V1 is the core control unit of the semiconductor high vacuum system, ensuring stable and continuous vacuum pumping operation of the turbo pump.
Edwards 2L11-000007-V1 涡轮控制器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
