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AMAT 0010-19188 冷却升降机组件

发布时间：2026-07-07人气：

1.产品资料介绍：

AMAT 0010-19188 适配应用材料半导体设备，负责晶圆降温升降输送。

AMAT 0010-19188 冷却升降机组件 产品英文

AMAT 0010-19188 Cooling Elevator Component Product Features

AMAT 0010-19188 is compatible with semiconductor equipment and is responsible for wafer cooling, lifting, and conveying.

Integrated servo drive, precise lifting and positioning, small repetition error

Equipped with a cooling base, it quickly removes waste heat from the wafer process

Built in limit sensor, anti overtravel collision, safety interlock

Stainless steel vacuum compatible material, dust-free chamber does not produce particles

Smooth transmission of the screw, no shaking during low-speed operation, protecting the wafer

Equipped with temperature probes, real-time monitoring of wafer cooling temperature

Optoelectronic isolation signal to resist cavity RF electromagnetic interference

Slow rise and slow fall control, reducing mechanical impact and extending lifespan

Integrated sealing structure, suitable for vacuum chamber working conditions

Standardized installation hole positions, directly matching equipment cavities

Factory full stroke aging detection, stable lifting action

Independent communication line, synchronizing temperature and position to the main control

Reinforce the bearing bracket to withstand long-term high-frequency reciprocating operation

The disassembly and assembly structure is simple, and maintenance does not require extensive disassembly

Original factory machine adaptation, can directly ｒｅｐｌａｃｅ old components of the same model

AMAT 0010-19188 is a core electromechanical component for wafer cooling and transportation, ensuring stable operation of cooling and wafer handling.

AMAT 0010-19188 冷却升降机组件 产品展示

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