1.产 品 资 料 介 绍：
TEL PWM010-TPB1 电源控制器
- 适配 TEL 刻蚀、薄膜沉积半导体设备，采用 PWM 脉宽调制精准调控腔体功率输出
- 高精度占空比调节，电压电流输出波动极小，保障工艺参数稳定不变
- 内置多级滤波电路，输出低纹波纯净供电，不干扰腔体传感检测信号
- 上电软启动回路，抑制瞬时浪涌电流，保护腔体精密电路板元器件
- 集成过压、过流、短路、过热四层硬件防护，故障快速切断输出并报警
- 多层金属屏蔽 PCB 结构，抵御等离子射频、变频器电磁干扰
- 洁净级低出气元器件，适配高等级无尘晶圆生产环境无杂质析出
- 板载实时信号反馈通道，向主控同步传输电压、温度运行数据
- 独立分区功率回路，单通道负载故障不会造成整机腔体停机
- 优化导热过孔布局，功率元器件长时间满载运行温升可控
- 标准金手指直插式结构，设备机柜快速插拔，检修替换省时便捷
- 工业宽温基材，腔体周边高低温工况性能无漂移衰减
- 加固 PCB 基板与焊点，设备震动、平台移动不易出现虚焊脱焊
- 板面清晰丝印点位标识，故障检修可快速定位线路故障点
- 原厂整机通电老化检测，同系列 TEL 半导体工艺设备直接兼容TEL PWM010-TPB1 电源控制器调压精准、防护完善，是半导体薄膜与刻蚀工艺腔体专用功率控制备件
TEL PWM010-TPB1 电源控制器 产品英文
TEL PWM010-TPB1 power controller
Suitable for TEL etching and thin film deposition semiconductor equipment, using PWM pulse width modulation to accurately control cavity power output
High precision duty cycle regulation, minimal voltage and current output fluctuations, ensuring stable and unchanged process parameters
Built in multi-stage filtering circuit, outputs low ripple pure power supply, does not interfere with cavity sensing and detection signals
Power on soft start circuit, suppress instantaneous surge current, protect precision circuit board components in the cavity
Integrate four layers of hardware protection for overvoltage, overcurrent, short circuit, and overheating, quickly cut off output and alarm in case of faults
Multi layer metal shielding PCB structure, resistant to plasma RF and frequency converter electromagnetic interference
Clean grade low exhaust components, suitable for high-grade dust-free wafer production environment without impurity precipitation
Onboard real-time signal feedback channel, synchronously transmitting voltage and temperature operation data to the main control
Independent partitioned power circuit, single channel load failure will not cause the entire machine cavity to shut down
Optimize the layout of thermal conductive vias to achieve controllable temperature rise during long-term full load operation of power components
Standard gold finger direct insertion structure, quick insertion and removal of equipment cabinets, time-saving and convenient maintenance and replacement
Industrial wide temperature substrate, high and low temperature performance around the cavity without drift attenuation
Strengthen the PCB substrate and solder joints to prevent virtual soldering and detachment during equipment vibration and platform movement
The board surface is clearly marked with silk screen printing points, and troubleshooting can quickly locate the fault points of the circuit
Original factory whole machine power on aging detection, directly compatible with TEL semiconductor process equipment of the same series
TEL PWM010-TPB1 power controller has precise voltage regulation and complete protection, and is a dedicated power control spare part for semiconductor thin film and etching process chambers
TEL PWM010-TPB1 电源控制器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
