1.产 品 资 料 介 绍:
TEL 3D81-000102-V1 接口模块产品特点
- TEL 3D81-000102-V1 适配东京电子刻蚀、涂胶显影半导体设备,负责各子系统信号中转
- 多路 IO 通讯通道,同步传输传感器与执行器信号
- 光耦隔离电路,屏蔽射频、电机电磁干扰
- 标准背板插槽,拆装更换简单
- 硬件看门狗,通讯异常自动复位恢复链路
- 集成过压、过流、静电多重电路防护
- 板载指示灯,通电、通讯、故障状态直观可见
- 整板三防涂层,洁净车间防尘防潮耐腐蚀
- 焊点加固工艺,腔体震动不易虚焊断线
- 恒温洁净室可 24 小时连续稳定运行
- 匹配 TEL 原厂设备总线,直连主控无需转接
- 本地存储故障日志,方便检修溯源
- 预留测试探针点位,线路校验排查便捷
- 长条紧凑版型,机柜多板卡堆叠节省空间
- 原厂定位接口,替换装配不用改动线路TEL 3D81-000102-V1 接口模块信号传输稳定,运维便捷,是 TEL 晶圆制程设备专用信号转接板卡
TEL 3D81-000102-V1 接口模块 产品英文
TEL 3D81-000102-V1 Interface Module Product Features
TEL 3D81-000102-V1 is compatible with Tokyo Electronics etching, coating and developing semiconductor equipment, responsible for signal transfer of various subsystems
Multi channel IO communication channel, synchronously transmitting sensor and actuator signals
Optocoupler isolation circuit, shielding RF and motor electromagnetic interference
Standard backplane slot, easy to disassemble and replace
Hardware watchdog, automatically resets and restores the link in case of communication abnormalities
Integrated overvoltage, overcurrent, and electrostatic multiple circuit protection
Onboard indicator light, with visible power on, communication, and fault status
Three proof coating for the whole board, dust-proof, moisture-proof and corrosion-resistant in the clean room
Welding point reinforcement process, cavity vibration is less prone to virtual welding and wire breakage
The constant temperature clean room can operate continuously and stably for 24 hours
Match TEL original equipment bus, directly connected to the main control without the need for transfer
Local storage of fault logs for easy maintenance and traceability
Reserved testing probe points for convenient line verification and troubleshooting
Compact and elongated version, with multiple stacked boards in the cabinet to save space
Original factory positioning interface, no need to modify the wiring for replacement assembly
TEL 3D81-000102-V1 interface module has stable signal transmission and convenient operation and maintenance. It is a dedicated signal adapter board for TEL wafer process equipment
TEL 3D81-000102-V1 接口模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




