Novellus 02-252395-00 数字动力控制系统
1.产 品 资 料 介 绍：
Novellus 02-252395-00 数字动力控制系统 产品英文
Novellus 02-252395-00 is a specialized digital power control system for thin film deposition equipment, with precise digital regulation that coordinates the power output and process power logic of each machine.
1. Fully digital PID control, with minimal power output fluctuations
2. Multiple power channels are independently controlled, and power supply in different zones does not interfere with each other
3. Digital filtering circuit to resist electromagnetic interference in clean rooms
4. Wide temperature stable operation, suitable for high and low temperature process environments of equipment
5. Gold plated communication terminal, long-term plug-in without contact offset
6. Millisecond level dynamic response, fast load changes, stable voltage and current
7. Built in fault self check, real-time alarm for overcurrent, overvoltage, and overheating
8. Reinforced plate structure to withstand continuous vibration conditions of the machine
9. Sealed dustproof and moisture-proof design, delaying internal circuit aging
10. Standard rack plug-in structure, easy maintenance and replacement
11. Multiple power protection, automatic cut-off of output in case of abnormalities to prevent burning out
12. Multiple sets of process parameter storage, one click switching of deposition formula
13. Digital communication bus, connected to the main control system of the whole machine
14. High energy conversion efficiency and low temperature rise during the operation of the whole machine
15. Original factory long-term aging test, supporting 7 × 24-hour uninterrupted work
Conclusion: The power control of Novellus 02-252395-00 is stable and reliable, and it is the core power control unit of Novellus thin film deposition equipment.
Novellus 02-252395-00 数字动力控制系统 产品展示
视频展示
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| 105-070005-01 | 531X111PSHARG2 | 6DD1684-0BJ0 |
| 105-070001-05 | 531X112PSAAEG1 | 531X111PSHAAG2 |
| 105-050010 | 6SC6170-0FC50 | 6DD1683-0CH1 |
| 105-040300-01 | 76-380346-01 | 6DD1684-0GE0 |
| 105-040200-02 | 6SC6600-4GA00 | 6DD1684-0EC0 |
| 105-032002-01 | 531X303MCPARG1 | 531X111PSHAKG2 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
