KYOSAN EAK2T 3M39-000028-12 匹配控制器

KYOSAN EAK2T 3M39-000028-12 匹配控制器  

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KYOSAN EAK2T 3M39-000028-12 匹配控制器  产品英文

KYOSAN EAK2T 3M39-000028-12 matching controller

KYOSAN EAK2T 3M39-000028-12 matching controller is compatible with TEL semiconductor RF matching system, with automatic impedance matching and stable operation.

1. Automatic adjustment of RF impedance, fast matching response speed

2. Closed loop feedback control, continuous and stable power output

3. Built in multiple circuit isolation to resist plasma interference

4. Compatible with original RF power supply, high overall compatibility

5. Real time collection of standing wave data, rapid warning of anomalies

6. Multiple protections against overcurrent, overvoltage, and overheating

7. Industrial metal body, dust-proof, corrosion-resistant and oil resistant in the workshop

8. Wide temperature operating range, with unchanged performance under high and low temperature conditions

9. Standard cabinet installation size, easy to disassemble and ｒｅｐｌａｃｅ

10. Equipped with a status indicator light, the fault is intuitive and easy to troubleshoot

11. Optimization of filtering circuit to reduce RF signal loss

12. Parameters can be debugged online, with short downtime for maintenance

13. Anti vibration structure, suitable for long-term continuous operation of production lines

14. Full electrical testing at the factory, high consistency and low failure rate

15. Low loss circuit design, low heat generation during long-term operation

In summary, KYOSAN EAK2T 3M39-000028-12 matching controller has high matching accuracy and complete protection, and is the core supporting component of the RF circuit of semiconductor etching equipment.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218