1.产 品 资 料 介 绍：
MKS EPCA-24592 通道控制器模块 产品英文
Product Features of MKS EPCA-24592 Channel Controller Module
MKS EPCA-24592 is a dedicated dual channel vacuum pressure control module for TEL semiconductor etching machines, which controls the signals of vacuum valves and vacuum gauges.
1. MKS EPCA-24592 original factory standard card, can be directly replaced with the same model without changing the wiring
2. Dual channel independent control, connected to vacuum valve and Baratron vacuum gauge respectively
3. Equipped with RS485 communication interface, it can transmit pressure data in real-time to the main control of the machine
4. Multiple IO terminals, collecting limit, alarm, and valve status switch signals
5. High precision pressure closed-loop regulation, stable vacuum chamber pressure control without overshoot
6. Metal shielding shell, dust-proof and anti-static compatible with dust-free wafer workshop
7. Layered isolation of strong and weak electrical lines to resist electromagnetic interference in the workshop
8. Multiple onboard protections, automatic channel cutoff for overcurrent, short circuit, and overheating
9. Front status indicator light, visually viewing channel operation and fault status
10. Standardized DB serial port connector, easy and fast disassembly, maintenance and wiring
11. Single channel independent circuit, one fault does not affect the other vacuum control
12. Industrial wide temperature element devices, continuous and stable operation in high and low temperature environments of cabinets
13. Built in signal filtering circuit to eliminate pressure signal jitter and distortion
14. Modular and compact rack structure, saving installation space inside the equipment
15. Factory full load vacuum condition aging test, low long-term machine failure rate
In summary, the MKS EPCA-24592 channel controller has precise voltage control, stable communication, and convenient maintenance, meeting the precise vacuum control requirements of semiconductor cavities.
MKS EPCA-24592 通道控制器模块 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
