1.产 品 资 料 介 绍：
MKS AS01496-AB-4 控制板 产品英文
MKS AS01496-AB-4 control board is used for closed-loop control of gas flow and pressure in semiconductor equipment, and is compatible with MFC flow controller signal processing
1. High precision analog data acquisition with small reading errors in flow and pressure values
2 independent signal channels can synchronously control multiple groups of gas pipelines
3 optocoupler isolation circuit isolates cavity RF electromagnetic interference
4 layers of precision wiring with low signal transmission loss and strong stability
5 standard plug-in card structure cabinet insertion and replacement is time-saving and convenient
6. Built in overcurrent, overvoltage, and short-circuit multiple circuit safety protection
7 supports factory specific communication bus docking with the main control unit of the whole machine
8 wide temperature substrate suitable for semiconductor dust-free clean room working conditions
9. Large area copper laying for heat dissipation, long-term full load, less prone to high temperature aging
10 strong and weak current line zoning layout to avoid signal crosstalk
11 gold-plated terminal interface anti-oxidation long-term contact without virtual soldering fault
Efficient maintenance and troubleshooting of equipment with over 12 reserved testing points
13 can store multiple sets of gas process parameters and switch processes with one click
14 Real time signal feedback automatically corrects flow output deviation
15. Suitable for various wafer process equipment for etching deposition film growth
MKS AS01496-AB-4 control board has precise signal processing and strong anti-interference ability to ensure stable operation of gas processes in semiconductor production lines
MKS AS01496-AB-4 控制板 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
