1.产 品 资 料 介 绍：
Zygo 8020-0237-03 控制器模块 产品英文介绍
Zygo 8020-0237-03 Controller Module
1. 8020-0237-03 relies on the principle of laser interference to achieve nanoscale displacement measurement
2. Dual channel measurement architecture, 8020-0237-03 can synchronously collect two position signals
3. Built in nonlinear error correction algorithm to continuously ensure measurement accuracy
4. Fast signal processing response, suitable for high-precision motion table closed-loop control
5. Metal shielding shell effectively resists external electromagnetic signal interference
6. Standardized VME bus interface for easy integration and assembly of chassis
7. Wide temperature working range, suitable for semiconductor cleanroom conditions
8. Equipped with optical path signal self-test function, quickly identify optical path abnormalities
9. Excellent linearity of data output, stable and reliable measurement repeatability
10. 8020-0237-03 supports multi module networking and expands the number of measurement axes
11. Multiple electrical protections to prevent voltage surges from damaging the core circuit
12. Compact modular structure, easy and efficient disassembly, maintenance, and replacement
13. Low noise signal acquisition, weakening measurement deviation caused by environmental vibration
14. Original factory rigorous aging testing, low failure rate during long-term continuous operation
15. Compatible with Zygo series laser interference heads, with strong device adaptability
Zygo 8020-0237-03 controller module is commonly used for high-precision position detection and servo feedback on semiconductor wafer platforms
Zygo 8020-0237-03 控制器模块 产品展示
视频展示
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| PFRL101C | AMAT 0100-09292 | PFTL 201CE-50.0KN |
| PFRL101B | AMAT 0100-00069 | PFTL 101BER-5.0KN |
| PFRL101A | AMAT 0100-35170 | PFTL 101AER-0.5 |
| PFEL113 | AMAT 0100-90861 | PFTL101A-1.0KN 3BSE004166R1 1.0KN |
| PFEL111 | AMAT 0100-00-01486 | PFTL101A 2.0KNK |
| PFEA113 | AMAT 0100-00192 | PFEA113-20 |
| PFEA112 | AMAT 0100-00133 | PFTL101A 2.0KNK |
| PFEA111 | AMAT 0100-09156 | PFTL 201CE-20.0KN |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
