1.产 品 资 料 介 绍：
Shimadzu EI-D3203M 涡轮分子泵控制器单元 产品英文介绍
Shimadzu EI-D3203M Turbomolecular Pump Controller Unit
1. Adapt to Shimadzu TMP series turbo molecular pump, control vacuum pump start stop and speed operation
2. Support local and remote dual-mode control, flexible matching with vacuum equipment control system
3. Shimadzu EI-D3203M has adjustable speed function to stably regulate the vacuum environment of the chamber
4. Real time collection of multiple operating parameters such as pump body speed, temperature, current, etc
5. Integrate a complete set of fault protection mechanisms for overcurrent, overheating, overload, and stall
6. Shimadzu EI-D3203M is equipped with RS232/RS485 communication interface, making it convenient for upper computer docking
7. Equipped with fault alarm output, quickly feedback abnormalities and execute shutdown protection logic
8. Shimadzu EI-D3203M has controllable starting and braking programs to reduce rotor mechanical impact
9. The status display is intuitive, making it easy for operation and maintenance personnel to quickly read equipment operating condition information
10. Support interlocking signal interaction, can achieve linkage control with vacuum gauge and gate valve
11. Industrial wide temperature body design, suitable for long-term uninterrupted operation in clean rooms
12. Shimadzu EI-D3203M output waveform is stable, ensuring low vibration operation of molecular pump
13. Built in operation log storage, easy to trace faults and analyze process data
14. Standard wiring port layout simplifies on-site installation and spare parts replacement operations
15. Complete online testing at the factory to ensure stable operation of the matching molecular pump
Shimadzu EI-D3203M Turbomolecular Pump Controller Unit is widely used in semiconductor and research high vacuum equipment vacuum system control components
Shimadzu EI-D3203M 涡轮分子泵控制器单元 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
