1.产 品 资 料 介 绍:
NIKON 4S013-545-2 步进式扫描仪 产品英文介绍
NIKON 4S013-545-2 Stepper Scanner Board
1. Compatible with Nikon lithography stepper scanning equipment, responsible for scanning motion signal processing
2. High precision timing control ensures synchronization of exposure step actions
3. Closed loop signal acquisition to improve the repeated positioning accuracy of the table
4. Built in multiple electrical protections to resist overcurrent and surge damage
5. High speed data bus transmission reduces scan instruction response latency
6. Slot type board structure, easy disassembly and replacement of cabinets
7. Hardware signal filtering, strong anti-interference in clean workshop electromagnetic environment
8. Power on automatic self check, quickly identify module operation faults
9. Power off and save process parameters, restart without the need for re debugging
10. Independent isolation of channel signals to prevent signal crosstalk
11. Support uninterrupted operation of long-term continuous lithography processes
12. Compact PCB layout, saving equipment control cabinet space
13. Gold plated interface pins enhance long-term connection stability
14. Compatible with multiple scanning step modes, flexible process adaptation
15. Original factory standard hardware solution with low failure rate during continuous operation
The NIKON 4S013-545-2 stepper scanner board is used in Nikon semiconductor lithography equipment and is the core board for motion control of lithography machine scanning tables.
NIKON 4S013-545-2 步进式扫描仪 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




