1.产 品 资 料 介 绍:
DAIHEN SVD-121-X0834 对准器 产品英文介绍
DAIHEN SVD-121-X0834 aligner
1. Suitable for semiconductor equipment, used for wafer center positioning and notch angle correction
2. High precision servo rotating mechanism with small positioning repetition error
3. Optical sensing detection of wafer edge and notch features
4. Cleanroom specific structure, low dust emission, suitable for wafer processing environment
5. Built in vacuum adsorption platform, stable wafer clamping
6. Integrated driver and signal interface for easy integration with device control
7. High speed alignment operation, shortening the processing cycle of a single chip
8. Equipped with vacuum anomaly and wafer missing detection alarm
9. Seismic resistant body design, suitable for continuous operation under automated conditions
10. Standardized installation dimensions for easy disassembly and replacement of the machine
11. Optimize rotational dynamic balance to reduce wafer slip risk
12. Support multi size wafer adaptation (according to device configuration)
13. Comes with fault code prompts for easy on-site maintenance
14. Signal isolation design to resist electromagnetic interference in the workshop
15. Follow the DAIHEN clean equipment factory inspection standards
The DAIHEN SVD-121-X0834 aligner achieves precise wafer alignment, ensuring the precision of robotic arm handling and process processing.
DAIHEN SVD-121-X0834 对准器 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




