FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器
1.产 品 资 料 介 绍：
FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器 产品英文介绍
FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller
1. FUJIKIN FCSP8202D-4CW2-F139BF39B is resistant to gas supply pressure fluctuations and has stable flow control
2. Fast flow response speed, sensitive and quick switching of airflow regulation
3. Installation orientation is not limited, and measurement data is stable when placed arbitrarily
4. Equipped with self checking function for traffic, it can automatically detect and prompt for abnormal operation
5. Compatible with multiple process gases, easy to convert for gas replacement and use
6. Clean and oil-free internal pipelines, suitable for semiconductor high-purity gas working conditions
7. The valve body is tightly sealed, and the air leakage during operation is extremely low
8. Compact body structure, space saving installation inside the air circuit cabinet
9. Stable digital signal transmission and smooth communication with industrial control systems
10. Low particle generation throughout the entire operation, without polluting the clean gas path
11. The working temperature zone is adapted to the regular temperature of the workshop, and has strong adaptability to working conditions
12. High control accuracy, small deviation in gas delivery flow rate, and good repeatability
13. Excellent seismic performance, the connection is not easy to loosen under equipment vibration environment
14. Internal valve components are wear-resistant and have a longer service life due to frequent start stop adjustments
15. Compliant with environmental regulations and compatible with various dust-free process production lines
FUJIKIN FCSP8202D-4CW2-F139BF39B is commonly used for precise flow control of high-purity gases in semiconductor processes
FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
