MKS 683B-25580 数字排气节流阀

MKS 683B-25580 数字排气节流阀  

1.产 品 资 料 介 绍：MKS 683B-25580 数字排气节流阀

1、MKS 683B-25580 集成控制驱动电路，无需搭配独立外置控制器

2、内置 PID 智能算法，真空调压到位快，压力超调量小

3、支持压力闭环、阀板位置两种工作模式灵活切换

4、数字通讯传输信号，抗电磁干扰，数据传输稳定

5、自带两路可编程报警点位，可接入安全联锁保护回路

6、阀口流量线性调节，腔体气压变化平缓无剧烈波动

7、阀体采用 316L 不锈钢材质，适配半导体洁净工艺气体

8、法兰标准规格，真空管路对接安装便捷密封性好

9、阀片定位分辨率高，微小开度调节精准可控

10、整机防尘适配无尘车间，长期工作不易积灰卡滞

11、可在线监测阀门开度、运行状态，方便日常巡检

12、内部直连齿轮驱动，运行扭矩充足，启闭顺畅有力

13、泄漏量极低，高真空工况下腔体保压效果优良

14、运行温区适配设备常规工作温度，高温工况性能稳定

15、支持总线对接整机主控，整套真空系统联动便捷

MKS 683B-25580 多用于半导体真空腔体排气压力精准调控，工艺稳定性强。

MKS 683B-25580 数字排气节流阀    产品英文介绍

MKS 683B-25580 Digital Exhaust Throttle Valve

1. MKS 683B-25580 integrated control driver circuit, no need to pair with independent external controller

2. Built in PID intelligent algorithm, fast vacuum pressure regulation, small pressure overshoot

3. Support flexible switching between two working modes: pressure closed-loop and valve plate position

4. Digital communication transmission signal, anti electromagnetic interference, stable data transmission

5. Comes with two programmable alarm points and can be connected to a safety interlock protection circuit

6. Linear adjustment of valve flow rate, with smooth and stable changes in chamber pressure without drastic fluctuations

7. The valve body is made of 316L stainless steel material, suitable for semiconductor clean process gases

8. Flange standard specifications, convenient installation of vacuum pipeline docking, good sealing performance

9. High positioning resolution of valve plate, precise and controllable adjustment of small opening degree

10. The whole machine is dust-proof and compatible with a dust-free workshop, making it less prone to dust accumulation and sticking during long-term operation

11. Can monitor valve opening and operating status online, facilitating daily inspections

12. Internally connected gear drive, sufficient operating torque, smooth and powerful opening and closing

13. Extremely low leakage, excellent pressure holding effect of the chamber under high vacuum conditions

14. Adapt the equipment to the normal operating temperature of the operating temperature zone, and ensure stable performance under high temperature conditions

15. Supports bus docking with the main control of the entire machine, and the entire vacuum system is easily linked together

MKS 683B-25580 is widely used for precise control of exhaust pressure in semiconductor vacuum chambers, with strong process stability.

MKS 683B-25580 数字排气节流阀  产品展示

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中文产品

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英文产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218