1.产 品 资 料 介 绍：
Zygo 8020-0237-01 控制器模块 产品英文介绍
Zygo 8020-0237-01 Controller Module
1. Dual channel laser interference signal analysis, Zygo 8020-0237-01 completes high-precision displacement measurement
2. 24 bit high-precision sampling, measurement accuracy can reach sub nanometer level
3. Compatible with fiber optic laser interference probe, stable signal acquisition
4. Equipped with network port, serial port, and parallel port, multiple ways to interface with the upper control system
5. Panel status indicator light, visually displaying channel operation and error status
6. Fine filtering of internal circuits to suppress measurement deviation caused by electromagnetic interference
7. Standard whole machine packaging, cabinet fixed installation, easy disassembly and assembly
8. Exclusive 5.2VDC power supply, simple and stable power adaptation
9. Real time calculation of displacement data with extremely low data output delay
10. Dustproof sealed shell, suitable for semiconductor dust-free workshop working conditions
11. 0-40 ℃ constant temperature working range, long-term measurement data does not drift
12. Dual channel independent operation, two measurements do not interfere with each other
13. Self check for abnormal circuit and quick alarm prompt for fiber breakage
14. Low power consumption operation of the whole machine, low heat generation during full load operation
15. High precision calibration and verification at the factory, strong stability in machine measurement
Zygo 8020-0237-01 is a precision measurement and control unit for ZMI501A, commonly used for nanoscale displacement monitoring and control of semiconductor equipment.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
