AMAT 0190-37798 联锁模块

AMAT 0190-37798 联锁模块 

1.产 品 资 料 介 绍：

AMAT 0190-37798 联锁模块   产品英文介绍

AMAT 0190-37798

1. 0190-37798 is compatible with AMAT semiconductor etching and CVD cavity safety interlock control

2. Collect multiple safety switch signals from the chamber door, gas path, and pressure

3. Trigger an exception and immediately force a shutdown to avoid process safety accidents

4. Optoelectronic isolation circuit, separating strong and weak electricity to prevent signal interference

5. Standard plug-in card structure, easy to plug, disassemble and ｒｅｐｌａｃｅ chassis

6. Supporting MKS communication architecture, seamlessly integrated with the main control of the entire machine

7. Multi channel relay contact output, executing locking power-off action

8. The panel indicator light intuitively displays the on/off status of each interlocking circuit

9. Hardware protection against short circuits and overcurrent to prevent modules from burning out on the spot

10. Industrial materials for clean rooms, suitable for dust-proof and moisture-proof cleanrooms

11. Anti site electromagnetic interference, long-term operation signal without false triggering

12. Equipped with fault memory lock, manual reset and unlocking are required after locking

13. Seismic reinforcement PCB, equipment vibration environment is less prone to virtual soldering and desoldering

14. Original factory exclusive logic program, no need for secondary rewriting to adapt to the entire machine

15. Continuous 24-hour uninterrupted stable operation, strong durability of the production line

AMAT 0190-37798 semiconductor equipment dedicated cavity safety interlock board, fully guarding the operation safety of wafer process equipment.

AMAT 0190-37798 联锁模块 产品展示

视频展示

中文产品

BENTLY 136188-02 电机驱动器
BENTLY 3500/15 输入输出模块
BENTLY 3500/32M继电器模块 

英文产品

1C31157G02 Input/output module
3BHB003688R0101 Power panel module
ESTIC TNA1-TU01-SH motor

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218