1.产 品 资 料 介 绍：
AMAT 0100-00516 腔室联锁板 产品英文介绍
AMAT 0100‑00516
1. Control of safety interlock signals in semiconductor process chambers
2. PVD coating machine cavity door interlock logic processing
3. Collection and judgment of cavity status signals for etching equipment
4. Vacuum chamber safety protection circuit signal relay
5. Assembly of interlocking board for 12 inch wafer machine
6. Abnormal state of the cavity triggers protection signal output
7. Detection and processing of safety interlock for machine cavity opening cover
8. Direct replacement of semiconductor production line fault interlock board
9. Process chamber pressure abnormal interlock signal processing
10. Internal safety signal docking of application materials for the whole machine
11. Clean environment circuit board usage for chip equipment
12. Equipment maintenance, disassembly, replacement of interlocking PCB accessories
13. Renovation and assembly of old AMAT semiconductor equipment
14. Execution of safety protection logic for plasma equipment
15. Daily maintenance spare parts usage for wafer factory equipment
AMAT 0100-00516 is a chamber interlock board used for semiconductor process chamber safety interlock signal processing and replacement of faulty spare parts.
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| 6410-008-N-N-N | 6DD1672-0AF0 | TRICONEX 4400 |
| 6410-007-N-N-N | 6DD1672-0AD0 | TRICONEX 8307A |
| 6410-006-N-N-N | 6DD1670-0AG0 | TRICONEX 8100 |
| 6410-005 | 6DD1670-0AF0 | TRICONEX 8305 |
| 6410-001-N-N-N-LF | 6DD1663-0AB0 | TRICONEX 4509 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
