1.产 品 资 料 介 绍:
AMAT 0190-77528 伺服电机 产品英文介绍
AMAT 0190-77528 servo motor
1. Application Material Semiconductor Equipment Dedicated Servo Motor
2. High precision position closed-loop, micrometer level positioning control
3. Built in high-precision encoder, feedback speed and position signal
4. Fast response speed, suitable for wafer mechanism reciprocating motion
5. Comes with overheating and overload hardware protection functions
6. Suitable for clean environment use of semiconductor process equipment
7. Smooth torque output, low vibration and noise during operation
8. Aviation plug interface, stable wiring and anti-interference
9. Support closed-loop control of the driver to achieve precise motion
10. Compact body, saving installation space inside the device
11. Industrial grade winding, capable of withstanding temperature changes in equipment cabinets
12. Resistant to vibration and impact, suitable for long-term continuous operation of equipment
13. Optional version with brake, power off locking shaft position
14. Protection level adapted to internal working conditions of semiconductor equipment
15. Compatible with AMAT series thin film and etching process equipment
AMAT 0190-77528 servo motors are motion executing components for semiconductor equipment, commonly used in wafer transfer and process chamber motion driving scenarios.
AMAT 0190-77528 伺服电机 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




