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MKS 253B-31797 节流蝶阀

发布时间:2026-08-17人气:
  • MKS 253B-31797 节流蝶阀
  • MKS 253B-31797 节流蝶阀
  • MKS 253B-31797 节流蝶阀

MKS 253B-31797 节流蝶阀 

1.产 品 资 料 介 绍:

# MKS 253B‑31797 节流蝶阀产品特点
MKS 253B‑31797 是真空排气节流蝶阀,多用于半导体真空腔体压力调节。
1、电动驱动,实现真空压力闭环调节
2、线性化传动结构,压力控制顺滑稳定
3、阀板定位分辨率高,调节精度好
4、密封性能优秀,低泄漏率
5、全开关动作响应速度快
6、MKS 253B‑31797 可匹配 MKS 系列压力控制器使用
7、阀体接触介质部分为不锈钢材质
8、适配高真空工艺腔体排气工况
9、抗压差能力强,承受阀前后压差
10、具备阀位反馈,便于系统读取状态
11、法兰标准接口,拆装更换方便
12、电机工作温度范围宽,适应设备环境
13、机械齿轮传动,运行噪音低
14、可适配多种工艺气体,耐腐蚀
15、结构紧凑,节省设备安装空间
MKS 253B‑31797 控制精度高,密封性好,广泛用于半导体真空工艺设备。

MKS 253B-31797 节流蝶阀   产品英文介绍

#MKS 253B-31797 Throttle Butterfly Valve Product Features


MKS 253B-31797 is a vacuum exhaust throttle butterfly valve, commonly used for pressure regulation in semiconductor vacuum chambers.

1. Electric drive, achieving closed-loop regulation of vacuum pressure

2. Linearized transmission structure, smooth and stable pressure control

3. High positioning resolution and good adjustment accuracy of valve plate

4. Excellent sealing performance and low leakage rate

5. Fast response speed of full switch action

6. MKS 253B-31797 can be matched with MKS series pressure controllers for use

7. The part of the valve body in contact with the medium is made of stainless steel material

8. Adapt to high vacuum process chamber exhaust conditions

9. Strong resistance to pressure difference, able to withstand the pressure difference before and after the valve

10. Equipped with valve position feedback for easy system reading of status

11. Flange standard interface, easy to disassemble and replace

12. The motor has a wide operating temperature range and is suitable for the equipment environment

13. Mechanical gear transmission with low operating noise

14. Compatible with various process gases and corrosion-resistant

15. Compact structure, saving equipment installation space


MKS 253B-31797 has high control accuracy and good sealing performance, and is widely used in semiconductor vacuum process equipment.

MKS 253B-31797 节流蝶阀 产品展示

mks_throttle_valve_253b-31797_1.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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