1.产 品 资 料 介 绍:
MKS 253B-31797 节流蝶阀 产品英文介绍
#MKS 253B-31797 Throttle Butterfly Valve Product Features
MKS 253B-31797 is a vacuum exhaust throttle butterfly valve, commonly used for pressure regulation in semiconductor vacuum chambers.
1. Electric drive, achieving closed-loop regulation of vacuum pressure
2. Linearized transmission structure, smooth and stable pressure control
3. High positioning resolution and good adjustment accuracy of valve plate
4. Excellent sealing performance and low leakage rate
5. Fast response speed of full switch action
6. MKS 253B-31797 can be matched with MKS series pressure controllers for use
7. The part of the valve body in contact with the medium is made of stainless steel material
8. Adapt to high vacuum process chamber exhaust conditions
9. Strong resistance to pressure difference, able to withstand the pressure difference before and after the valve
10. Equipped with valve position feedback for easy system reading of status
11. Flange standard interface, easy to disassemble and replace
12. The motor has a wide operating temperature range and is suitable for the equipment environment
13. Mechanical gear transmission with low operating noise
14. Compatible with various process gases and corrosion-resistant
15. Compact structure, saving equipment installation space
MKS 253B-31797 has high control accuracy and good sealing performance, and is widely used in semiconductor vacuum process equipment.
MKS 253B-31797 节流蝶阀 产品展示

视频展示
中文产品
3HNM07686-1 压力控制阀
Bently 3500/15 电源模块
Mitsubishi A1SJ51T64 温度控制模块
6186-M15ALTR/B Operation panel
ACMETRANSFORMER T-2-53007-S transformer
IC695CPE310-ABAD gas turbine electric card
| AMAT 0100-01321 | AMAT 0190-62317 | AMAT 0190-17779 |
| AMAT 0100-00427 | AMAT 0190-63008 | AMAT 0190-17846 |
| AMAT 0100-77069 | AMAT 0190-63269 | AMAT 0190-18061 |
| AMAT 0100-20069 | AMAT 0190-63361 | AMAT 0190-18061 |
| AMAT 0100-18039 | AMAT 0190-63452 | AMAT 0190-18066 |
| AMAT 0130-01362 | AMAT 0190-63740 | AMAT 0190-18067 |
| AMAT 0100-02293 | AMAT 0190-63786 | AMAT 0190-18112 |
| AMAT 0100-71443 | AMAT 0190-64148 | AMAT 0190-18113 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




