Shimadzu 3Z80-000025-V1 涡轮分子泵控制器

Shimadzu 3Z80-000025-V1 涡轮分子泵控制器 

1.产 品 资 料 介 绍：

Shimadzu 3Z80-000025-V1 涡轮分子泵控制器   产品英文介绍

#Shimadzu 3Z80-000025-V1 Turbomolecular Pump Controller Product Features

Shimadzu 3Z80-000025-V1 is a specialized molecular pump drive controller for semiconductor machines, which controls the start stop, speed regulation, and status monitoring of turbo molecular pumps.

1. Provide stable driving output and control the high-speed operation of the molecular pump

2. Support the complete process control of pump acceleration, constant speed, and braking

3. Speed closed-loop regulation ensures smooth operation of the speed

4. Equipped with multiple protections for overcurrent, overvoltage, overheating, and overload

5. Local start stop, also supports remote signal control of the machine

6. Shimadzu 3Z80-000025-V1 supports serial communication and uploads pump operation data

7. Real time collection of operating parameters such as speed, temperature, and current

8. Fault code prompt, convenient for quickly troubleshooting pump body abnormalities

9. Regenerative braking function, reducing downtime and deceleration time

10. Board type structure, convenient disassembly and replacement of cabinet slots

11. Electrical isolation to resist electromagnetic interference inside the cabinet

12. Compatible with Shimadzu original turbo molecular pump, with good overall compatibility

13. Wide temperature adaptability, able to withstand the internal working conditions of equipment cabinets

14. Power on self-test, automatic hardware status detection upon power on

15. Suitable for long-term uninterrupted production line continuous operation

Shimadzu 3Z80-000025-V1 has stable driving and is commonly used in semiconductor etching and deposition vacuum equipment.

Shimadzu 3Z80-000025-V1 涡轮分子泵控制器 产品展示

视频展示

中文产品

 3BHB003688R0101 总线接口模块
EMERSON PMC422FP 控制系统板卡模块
 PFEA112-20 3BSE050091R20 张力放大器

英文产品

DC732F 3BDH000375R0001 Input/output module
TU715F 3BDH000378R0001 Industrial control module
 AX722F 3BDH000377R0001 module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218