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AMAT 0190-A5841 双离子泵控制器

发布时间:2026-08-19人气:
  • AMAT 0190-A5841 双离子泵控制器
  • AMAT 0190-A5841 双离子泵控制器
  • AMAT 0190-A5841 双离子泵控制器

AMAT 0190-A5841 双离子泵控制器 

1.产 品 资 料 介 绍:

AMAT 0190‑A5841 双离子泵控制器,半导体真空系统专用控制单元,运行稳定。
1、AMAT 0190‑A5841 可同时控制两路离子泵,双泵独立管控
2、适配高真空腔体,实现真空度闭环调节
3、高压输出稳定,适配离子泵高压工作需求
4、AMAT 0190‑A5841 实时采集真空压力信号
5、具备过流保护,防止泵体负载异常损坏
6、故障状态指示灯,直观反馈设备异常
7、AMAT 0190‑A5841 支持本地与设备远程通讯
8、真空参数可设置,适配不同腔体工况
9、断电可保存运行参数,重启不用重复设置
10、AMAT 0190‑A5841 抗工艺环境电磁干扰
11、内置故障记录,便于产线排查问题
12、标准机架式安装,拆装维护便捷
13、AMAT 0190‑A5841 具备泵体互锁安全逻辑
14、工业元器件,适配半导体机台严苛环境
15、输出信号对接主机,参与整机工艺联锁
AMAT 0190‑A5841 双离子泵控制器,多用于半导体设备真空腔体控制。

AMAT 0190-A5841 双离子泵控制器   产品英文介绍

AMAT 0190-A5841 dual ion pump controller, a dedicated control unit for semiconductor vacuum systems, operates stably.

1. AMAT 0190-A5841 can simultaneously control two ion pumps, with dual pumps independently controlled

2. Adapt to high vacuum chambers to achieve closed-loop adjustment of vacuum degree

3. Stable high-voltage output, suitable for the high-pressure working requirements of ion pumps

4. AMAT 0190-A5841 Real time acquisition of vacuum pressure signals

5. Equipped with overcurrent protection to prevent abnormal load damage to the pump body

6. Fault status indicator light, providing visual feedback of equipment abnormalities

7. AMAT 0190-A5841 supports remote communication between local and device

8. Vacuum parameters can be set to adapt to different chamber conditions

9. Power off can save operating parameters, restart does not require repeated settings

10. AMAT 0190-A5841 Anti Process Environment Electromagnetic Interference

11. Built in fault record for easy troubleshooting on the production line

12. Standard rack mounted installation, easy disassembly and maintenance

13. AMAT 0190-A5841 has pump body interlock safety logic

14. Industrial components, suitable for harsh environments of semiconductor machines

15. Output signal to connect with the host and participate in the overall process interlocking of the machine

AMAT 0190-A5841 dual ion pump controller, commonly used for vacuum chamber control in semiconductor equipment.

AMAT 0190-A5841 双离子泵控制器 产品展示

0190-A5841 (1).jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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