1.产 品 资 料 介 绍：
NIKON 4S588-13 六轴振动测量装置 产品英文介绍
NIKON 4S588-13 six axis vibration measurement device, a specialized detection component for semiconductor lithography machines, collects six degrees of freedom vibration displacement data.
1. NIKON 4S588-13 supports six axis synchronous vibration detection and multi-dimensional acquisition of vibration signals
2. High measurement accuracy, capturing small amplitudes and offsets
3. Fast response speed, real-time output of vibration detection data
4. NIKON 4S588-13 can collect multiple parameters such as displacement, jitter, and tilt
5. Anti site environmental interference, stable internal measurement of the machine
6. Output standardized signals to interface with the main control system of the machine
7. NIKON 4S588-13 comes with a built-in status self-test to identify hardware abnormalities
8. Real time data feedback for equipment vibration compensation and correction
9. Fault data cache, convenient for device fault tracing and maintenance
10. NIKON 4S588-13 is compact in size and suitable for small installation spaces in lithography machines
11. Industrial grade components, capable of long-term uninterrupted testing operations
12. Support temperature environment adaptation and withstand temperature changes inside the cabinet
13. NIKON 4S588-13 metal shell protection, resistant to slight vibration and impact
14. Can participate in the interlocking of the whole machine, output alarm for excessive vibration
15. Data uploading machine, used for process status monitoring
NIKON 4S588-13 Six axis Vibration Measurement Device, mainly used for vibration monitoring and compensation of semiconductor exposure equipment
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
