1.产 品 资 料 介 绍：
MKS 1179A21CR1BV 质量流量控制器 产品英文介绍
MKS 1179A21CR1BV quality flow controller, semiconductor process gas control unit, precise control.
1. Thermal sensing detection with high accuracy in gas flow measurement
2. Good zero stability and small drift during long-term operation
3. Built in proportional control valve, quick response to flow regulation
4. Stainless steel gas chamber, suitable for various process gases
5. Excellent sealing material, suitable for clean process environment
6. Standard 3-inch appearance, convenient for direct rack installation
7. D-type interface, simple wiring, compatible with old equipment cables
8. Supports 0-5V analog signal input and output
9. Good flow repetition performance, ensuring process consistency
10. Equipped with remote valve switch control function
11. Anti electromagnetic interference, suitable for complex working conditions in the workshop
12. Short startup preheating time, reducing standby time
13. Strong pressure tolerance and resistance to pipeline impact
14. Can be directly replaced with spare parts without the need to modify the gas circuit
15. Suitable for 7 × 24-hour continuous process operation
MKS 1179A21CR1BV quality flow controller, commonly used for gas flow control in semiconductor and vacuum equipment.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
