1.产 品 资 料 介 绍：
Edwards A57222958 干式真空泵 产品英文介绍
#Edwards A57222958 Dry Vacuum Pump Product Features
Edwards A57222958 semiconductor dry vacuum pump, suitable for load lock and light corrosion process exhaust, with the following features:
1. Claw type oil-free dry structure, independent oil chamber isolation for bearings and gears
2. Non contact operation of the rotor reduces the generation of internal wear particles
3. Built in controllable nitrogen purging to suppress the adhesion of process by-products
4. Adaptive variable frequency drive, with the pumping speed dynamically adjusted according to the actual load
5. Rapid pumping performance, shortening the waiting period for cavity emptying
6. Air cooled cooling architecture, no need for external cooling water, flexible layout
7. Built in gas town module, processing condensable process gases such as water vapor
8. Local status indicator light, providing intuitive feedback on pump operating conditions
9. Digital communication interface, compatible with fab automation control system
10. Complete operation log storage, convenient for fault tracing and analysis
11. The intake end is equipped with an isolation valve, which prevents medium backflow when the machine is stopped
12. Integrated shock-absorbing base to reduce the overall vibration transmission output of the machine
13. Multi level safety interlock protection for overheating, overload, and abnormal intake
14. Compact body, suitable for Subfab's narrow installation space
15. Modular layout of vulnerable parts, easy on-site maintenance and disassembly
Edwards A57222958 dry vacuum pump, air-cooled without water cooling, low particle output, suitable for semiconductor load lock and thin film process exhaust conditions.
视频展示
其他产品
Schneider 140ACO13000 综合自动化装置
SCHNEIDER 140AMM09000 中央处理器
SCHNEIDER 140CHS11000 输入输出模块
8115-DO-DC Gas turbine communication module
8121-DI-DC Gas turbine communication module
8502-BI-DP Communication module
| PMA43R-10100-00 | IEPAF02 | PFTL101AE-1.0KN 3BSE004212R1 1.0KN |
| PMA43Q-Y0100-02 | AMAT 0100-90554 | PFTL101B-10KN 3BSE004197R1 |
| PMA43Q-10100-00 | NKTU116 | PFTL101AER-0.5KN 3BSE023010R1 |
| PMA43Q-00100-00 | 07AA63 | PFTL101B 50KN |
| PMA43P-11100-00 | ICSO16N1 | PFTL-101B 5KN 3BSE00418SR1 |
| PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
