RECIF SRT300F60 端口单臂晶圆转移工具

RECIF SRT300F60 端口单臂晶圆转移工具  

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RECIF SRT300F60 端口单臂晶圆转移工具  产品英文介绍

#RECIF SRT300F60 Port Single Arm Wafer Transfer Tool Product Features

RECIF SRT300F60 is a semiconductor port single arm wafer transfer tool used for material transfer at 300mm wafer FOUP ports. Its features are as follows:

1. Single arm transmission structure, compatible with Loadport port port docking operations

2. Non vacuum contact end effector to avoid wafer adsorption damage

3. Servo multi axis linkage, smooth and low shaking handling action

4. High repeatability positioning accuracy to meet the requirements of 12 inch wafer transfer

5. Built in wafer detection sensor to identify missing chips and abnormal stacking

6. Clean grade body design, controlling the generation of micro particles

7. Supports standard FOUP vehicles and is compatible with SEMI industry standards

8. Integrate gap alignment function to complete wafer pre positioning

9. Fast transmission speed, improving port switching throughput

10. ESD electrostatic protection, protecting sensitive device wafers

11. Comes with fault alarm output for easy monitoring of production line status

12. Digital communication interface, capable of interfacing with device control systems

13. Compact body, suitable for EFEM front-end narrow installation space

14. Multiple soft collision protection to reduce debris risk

15. Modular components, easy on-site disassembly and maintenance

RECIF SRT300F60 port single arm wafer transfer tool, clean, safe, and stable to complete wafer transfer operations between ports and chambers

RECIF SRT300F60 端口单臂晶圆转移工具  产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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