Kyosan Electric 0190-64462 射频发生器

Kyosan Electric 0190-64462 射频发生器 

1.产 品 资 料 介 绍：

Kyosan Electric 0190-64462 射频发生器 产品英文介绍

Kyosan Electric 0190-64462 RF generator is a semiconductor machine plasma process RF power supply unit that provides RF energy to the cavity. The core product features are as follows:

1. High power output accuracy and stable process repeatability

2. Supports both continuous and pulse RF output modes

3. Built in impedance adaptive, adapted to changes in cavity load

4. Good harmonic suppression effect, reducing process interference

5. Multiple fault protection for standing wave, over temperature, and over current

6. Real time collection of power standing wave data and uploading

7. Compatible with AMAT machine communication protocol, main control linkage

8. Water cooling and heat dissipation, supporting long-term high-power operation

9. Fast matching response and high plasma arc initiation efficiency

10. Fault code output for easy troubleshooting of equipment

11. Rack mounted structure, easy disassembly and replacement of cabinets

12. The whole machine is environmentally resistant and suitable for semiconductor cleanrooms

13. Wide power regulation range, suitable for multiple process formulas

14. Status indicator light, visually viewing equipment operating conditions

15. RF isolation design to reduce system signal interference

The Kyosan Electric 0190-64462 RF generator operates reliably and is commonly used in etching and thin film deposition semiconductor process chambers.

Kyosan Electric 0190-64462 射频发生器 产品展示

视频展示

其他产品

SBS PMC-HS-SERIAL 串行四通道高速模块
GE VMIACC-5595-208 350-805595-208L 反射内存集线器
 KUC755AE106 3BHB005243R0106 驱动器模块 

英文产品

TRICONEX FTA-544 17-550544-001B module
TRICONEX FTA-554 base module
HONEYWELL FTA-T-02 base module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218