NESLAB 620000000015 换热式冷水机组

NESLAB 620000000015 换热式冷水机组 

1.产 品 资 料 介 绍：

NESLAB 620000000015 换热式冷水机组 产品英文介绍

NESLAB 62000000015 is a heat exchange chiller unit for semiconductor equipment, providing high flow precision circulation cooling.

Application areas

1. Constant temperature cooling of power components in semiconductor etching equipment

2. Heat dissipation of PVD film deposition equipment cavity module

3. Thermal management of the entire semiconductor ion implantation machine

4. RF power supply high-power module cyclic cooling

5. Temperature control of wafer processing platform

6. Vacuum process equipment heat exchanger matching refrigeration

7. Cooling conditions of semiconductor CMP equipment components

8. Heat dissipation and temperature control of large ion source equipment

9. Multi load synchronous cooling of chip testing equipment

10. Temperature control of process circuits in semiconductor production workshops

Product Parameters

1. Three phase 200-208V power supply, 50/60Hz industrial frequency

2. Heat exchange circulation structure, compatible with deionized water cooling medium

3. PID closed-loop temperature control, temperature stability ± 0.1 ℃

4. Integrated flow, liquid level, over temperature, and high pressure multiple protections

5. Supports analog signal communication and can be connected to semiconductor control systems

Overall, the NESLAB 62000000015 chiller unit has a large output flow rate and reliable operation, making it an important heat exchange and cooling unit for semiconductor process equipment

NESLAB 620000000015 换热式冷水机组  产品展示

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英文产品

XXD129A01 3BHE012436R0001 PEC800-BP module
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3BHB003688R0001 pulse output card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218